GB1605268A - Optical scanning device - Google Patents

Optical scanning device Download PDF

Info

Publication number
GB1605268A
GB1605268A GB5145677A GB5145677A GB1605268A GB 1605268 A GB1605268 A GB 1605268A GB 5145677 A GB5145677 A GB 5145677A GB 5145677 A GB5145677 A GB 5145677A GB 1605268 A GB1605268 A GB 1605268A
Authority
GB
United Kingdom
Prior art keywords
mirror
point
field
objective
axis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB5145677A
Other languages
English (en)
Inventor
Fernand Loy
Jean Sebastien Dubuisson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Telecommunications Radioelectriques et Telephoniques SA TRT
Original Assignee
Telecommunications Radioelectriques et Telephoniques SA TRT
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Telecommunications Radioelectriques et Telephoniques SA TRT filed Critical Telecommunications Radioelectriques et Telephoniques SA TRT
Publication of GB1605268A publication Critical patent/GB1605268A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N3/00—Scanning details of television systems; Combination thereof with generation of supply voltages
    • H04N3/02—Scanning details of television systems; Combination thereof with generation of supply voltages by optical-mechanical means only
    • H04N3/08—Scanning details of television systems; Combination thereof with generation of supply voltages by optical-mechanical means only having a moving reflector
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/12—Scanning systems using multifaceted mirrors
    • G02B26/125—Details of the optical system between the polygonal mirror and the image plane
    • G02B26/126—Details of the optical system between the polygonal mirror and the image plane including curved mirrors

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • Lenses (AREA)
  • Mechanical Optical Scanning Systems (AREA)
GB5145677A 1977-01-26 1977-12-09 Optical scanning device Expired GB1605268A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7702161A FR2593657B2 (fr) 1977-01-26 1977-01-26 Dispositif de balayage optico-mecanique.

Publications (1)

Publication Number Publication Date
GB1605268A true GB1605268A (en) 1987-02-04

Family

ID=9185923

Family Applications (1)

Application Number Title Priority Date Filing Date
GB5145677A Expired GB1605268A (en) 1977-01-26 1977-12-09 Optical scanning device

Country Status (5)

Country Link
DE (1) DE2802950A1 (enrdf_load_stackoverflow)
FR (1) FR2593657B2 (enrdf_load_stackoverflow)
GB (1) GB1605268A (enrdf_load_stackoverflow)
IT (1) IT1203128B (enrdf_load_stackoverflow)
NL (1) NL190769C (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002027402A3 (en) * 2000-09-29 2002-07-11 Zeiss Carl Illumination system particularly for microlithography
US7109497B2 (en) 1998-05-05 2006-09-19 Carl Zeiss Smt Ag Illumination system particularly for microlithography

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2634903B1 (fr) * 1979-07-25 1991-05-10 Trt Telecom Radio Electr Radar a laser infrarouge

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2037444A5 (enrdf_load_stackoverflow) * 1969-02-28 1970-12-31 Nat Res Dev
DE2011883B1 (de) * 1970-03-13 1971-09-09 Eltro Gmbh & Co Ges F Strahlungstechnik Optoelektronisches System zur zeilen weisen Bildfeldabtastung
US3764192A (en) * 1971-05-28 1973-10-09 Hughes Aircraft Co Optical raster scan generator
US3790246A (en) * 1971-10-26 1974-02-05 Eastman Kodak Co X-y optical scanning system
FR2245970B1 (enrdf_load_stackoverflow) * 1973-08-07 1977-05-13 Trt Telecom Radio Electr
GB1478761A (en) * 1975-04-15 1977-07-06 Hughes Aircraft Co Thermal imaging system with redundant object space scanning

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7109497B2 (en) 1998-05-05 2006-09-19 Carl Zeiss Smt Ag Illumination system particularly for microlithography
WO2002027402A3 (en) * 2000-09-29 2002-07-11 Zeiss Carl Illumination system particularly for microlithography

Also Published As

Publication number Publication date
NL190769B (nl) 1994-03-01
FR2593657B2 (fr) 1988-05-13
IT1203128B (it) 1989-02-15
NL7714501A (nl) 1986-12-01
NL190769C (nl) 1994-08-01
DE2802950C2 (enrdf_load_stackoverflow) 1988-06-23
FR2593657A2 (fr) 1987-07-31
DE2802950A1 (de) 1987-12-10

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Legal Events

Date Code Title Description
PS Patent sealed
PE20 Patent expired after termination of 20 years

Effective date: 19960127