GB1584005A - Electro-magnetic lens assemblies for use in corpascular beam devices - Google Patents
Electro-magnetic lens assemblies for use in corpascular beam devices Download PDFInfo
- Publication number
- GB1584005A GB1584005A GB2493477A GB2493477A GB1584005A GB 1584005 A GB1584005 A GB 1584005A GB 2493477 A GB2493477 A GB 2493477A GB 2493477 A GB2493477 A GB 2493477A GB 1584005 A GB1584005 A GB 1584005A
- Authority
- GB
- United Kingdom
- Prior art keywords
- lens
- sections
- excitation
- lens assembly
- case
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000000712 assembly Effects 0.000 title claims description 7
- 238000000429 assembly Methods 0.000 title claims description 7
- 230000005284 excitation Effects 0.000 claims description 59
- 238000006073 displacement reaction Methods 0.000 claims description 17
- 238000009826 distribution Methods 0.000 claims description 17
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 12
- 229910052742 iron Inorganic materials 0.000 claims description 6
- 238000004804 winding Methods 0.000 claims description 6
- 230000007547 defect Effects 0.000 claims description 5
- 230000003287 optical effect Effects 0.000 claims description 4
- 230000006698 induction Effects 0.000 claims description 2
- 230000005540 biological transmission Effects 0.000 description 5
- 230000000694 effects Effects 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 101100400378 Mus musculus Marveld2 gene Proteins 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/10—Lenses
- H01J37/14—Lenses magnetic
- H01J37/141—Electromagnetic lenses
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Beam Exposure (AREA)
- Coils Or Transformers For Communication (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19762627176 DE2627176B2 (de) | 1976-06-15 | 1976-06-15 | Elektronenstrahloptisches Projektionsgerät mit einer langbrennweitigen magnetischen Linse |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1584005A true GB1584005A (en) | 1981-02-04 |
Family
ID=5980761
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB2493477A Expired GB1584005A (en) | 1976-06-15 | 1977-06-15 | Electro-magnetic lens assemblies for use in corpascular beam devices |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JPS52153662A (enrdf_load_stackoverflow) |
| DE (1) | DE2627176B2 (enrdf_load_stackoverflow) |
| FR (1) | FR2355374A1 (enrdf_load_stackoverflow) |
| GB (1) | GB1584005A (enrdf_load_stackoverflow) |
| NL (1) | NL7706304A (enrdf_load_stackoverflow) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2192092A (en) * | 1986-06-25 | 1987-12-31 | Philips Electronic Associated | Magnetic lens system |
| GB2334372A (en) * | 1998-02-11 | 1999-08-18 | Nikon Corp | System for directing a charged particle beam, e.g. for electron beam projection |
| CN103811251A (zh) * | 2012-11-08 | 2014-05-21 | 北京中科信电子装备有限公司 | 一种离子注入系统中束流均匀性调节装置 |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2752598C3 (de) * | 1977-11-25 | 1981-10-15 | Dr.-Ing. Rudolf Hell Gmbh, 2300 Kiel | Verfahren zum Betrieb einer elektromagnetischen fokussierenden elektronen-optischen Linsenanordnung und Linsenanordnung hierfür |
| JPS5678051A (en) * | 1979-11-30 | 1981-06-26 | Jeol Ltd | Electron beam device |
| US4345152A (en) * | 1980-08-11 | 1982-08-17 | The Perkin-Elmer Corporation | Magnetic lens |
| DE102004019835B4 (de) * | 2004-04-23 | 2007-08-02 | Vistec Electron Beam Gmbh | Beleuchtungskondensor für ein Partikeloptik-Projektionssystem |
-
1976
- 1976-06-15 DE DE19762627176 patent/DE2627176B2/de active Granted
-
1977
- 1977-04-27 FR FR7712711A patent/FR2355374A1/fr active Granted
- 1977-06-08 NL NL7706304A patent/NL7706304A/xx not_active Application Discontinuation
- 1977-06-15 JP JP7095177A patent/JPS52153662A/ja active Pending
- 1977-06-15 GB GB2493477A patent/GB1584005A/en not_active Expired
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2192092A (en) * | 1986-06-25 | 1987-12-31 | Philips Electronic Associated | Magnetic lens system |
| EP0251381A3 (en) * | 1986-06-25 | 1989-02-08 | Philips Electronics Uk Limited | Magnetic lens system |
| GB2334372A (en) * | 1998-02-11 | 1999-08-18 | Nikon Corp | System for directing a charged particle beam, e.g. for electron beam projection |
| CN103811251A (zh) * | 2012-11-08 | 2014-05-21 | 北京中科信电子装备有限公司 | 一种离子注入系统中束流均匀性调节装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| FR2355374A1 (fr) | 1978-01-13 |
| DE2627176C3 (enrdf_load_stackoverflow) | 1979-05-17 |
| NL7706304A (nl) | 1977-12-19 |
| DE2627176B2 (de) | 1978-09-14 |
| DE2627176A1 (de) | 1977-12-22 |
| JPS52153662A (en) | 1977-12-20 |
| FR2355374B1 (enrdf_load_stackoverflow) | 1980-09-12 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PS | Patent sealed | ||
| PCNP | Patent ceased through non-payment of renewal fee |