GB1535963A - Corpuscular beam apparatus - Google Patents

Corpuscular beam apparatus

Info

Publication number
GB1535963A
GB1535963A GB527276A GB527276A GB1535963A GB 1535963 A GB1535963 A GB 1535963A GB 527276 A GB527276 A GB 527276A GB 527276 A GB527276 A GB 527276A GB 1535963 A GB1535963 A GB 1535963A
Authority
GB
United Kingdom
Prior art keywords
chamber
camera
storage
containers
collecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB527276A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Publication of GB1535963A publication Critical patent/GB1535963A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/22—Optical, image processing or photographic arrangements associated with the tube
    • H01J37/224—Luminescent screens or photographic plates for imaging; Apparatus specially adapted therefor, e. g. cameras, TV-cameras, photographic equipment or exposure control; Optical subsystems specially adapted therefor, e. g. microscopes for observing image on luminescent screen
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B42/00—Obtaining records using waves other than optical waves; Visualisation of such records by using optical means
    • G03B42/02—Obtaining records using waves other than optical waves; Visualisation of such records by using optical means using X-rays
    • G03B42/021—Apparatus for direct X-ray cinematography

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Packages (AREA)
  • Sampling And Sample Adjustment (AREA)

Abstract

1535963 Corpuscular beam apparatus SIEMENS AG 11 Feb 1976 [12 Feb 1975] 5272/76 Heading G2A Corpuscular beam apparatus (eg an electron microscope) is combined with a camera device comprising a camera chamber, storage and collector containers for unexposed and exposed photographic material respectively, means for producing a vacuum tight seal between the camera chamber and the storage container, means for producing a vacuum tight seal between the collecting and storage containers, and means for evacuating both containers. As shown, the apparatus comprises electron microscope 1, TV camera 51, camera chamber 3, plate transport mechanism 15, storage container 4, collecting container 6, photographic plates 8 and vacuum pump 48. There are respective sealed openings 9 and 10 in chambers 4 and 6, a connection from chamber 4 to chamber 6 having a seal 12,and an inter-connection between microscope 1 and chamber 4 having a seal 11. Seals 11 and 12 are illustrated in detail in Fig. 3 (not shown) and transport mechanism 15 is illustrated in detail in Fig. 4 (not shown). In Fig. 2 (not shown), the storage and collecting containers each have three parts to enable handling of plates of two different sensitivities and the collecting container has an outlet air lock for individual plates.
GB527276A 1975-02-12 1976-02-11 Corpuscular beam apparatus Expired GB1535963A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19752506887 DE2506887B1 (en) 1975-02-12 1975-02-12 BODY BLASTING DEVICE WITH A PHOTO DEVICE

Publications (1)

Publication Number Publication Date
GB1535963A true GB1535963A (en) 1978-12-13

Family

ID=5939162

Family Applications (1)

Application Number Title Priority Date Filing Date
GB527276A Expired GB1535963A (en) 1975-02-12 1976-02-11 Corpuscular beam apparatus

Country Status (4)

Country Link
JP (1) JPS51107061A (en)
DE (1) DE2506887B1 (en)
GB (1) GB1535963A (en)
NL (1) NL7513417A (en)

Also Published As

Publication number Publication date
DE2506887B1 (en) 1976-11-11
JPS51107061A (en) 1976-09-22
NL7513417A (en) 1976-08-16

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Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee