GB1514290A - Method and apparatus for effecting ion implantation of semiconductor wafers - Google Patents

Method and apparatus for effecting ion implantation of semiconductor wafers

Info

Publication number
GB1514290A
GB1514290A GB51944/75A GB5194475A GB1514290A GB 1514290 A GB1514290 A GB 1514290A GB 51944/75 A GB51944/75 A GB 51944/75A GB 5194475 A GB5194475 A GB 5194475A GB 1514290 A GB1514290 A GB 1514290A
Authority
GB
United Kingdom
Prior art keywords
passage
implantation
wafer
chamber
ion implantation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB51944/75A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Accelerators Inc
Original Assignee
Accelerators Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to AU87143/75A priority Critical patent/AU500872B2/en
Application filed by Accelerators Inc filed Critical Accelerators Inc
Publication of GB1514290A publication Critical patent/GB1514290A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
GB51944/75A 1974-11-30 1975-12-18 Method and apparatus for effecting ion implantation of semiconductor wafers Expired GB1514290A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU87143/75A AU500872B2 (en) 1974-11-30 1975-12-01 Benzo and paphtno pyran-4-one-carboxylic acids

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/549,082 US3951695A (en) 1975-02-11 1975-02-11 Automatic end station for ion implantation system

Publications (1)

Publication Number Publication Date
GB1514290A true GB1514290A (en) 1978-06-14

Family

ID=24191584

Family Applications (1)

Application Number Title Priority Date Filing Date
GB51944/75A Expired GB1514290A (en) 1974-11-30 1975-12-18 Method and apparatus for effecting ion implantation of semiconductor wafers

Country Status (5)

Country Link
US (1) US3951695A (en:Method)
JP (1) JPS5838932B2 (en:Method)
CH (1) CH607330A5 (en:Method)
DE (1) DE2556456C2 (en:Method)
GB (1) GB1514290A (en:Method)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58140961A (ja) * 1982-02-17 1983-08-20 Hitachi Ltd ウエ−ハ搬送装置
US4672210A (en) * 1985-09-03 1987-06-09 Eaton Corporation Ion implanter target chamber
JPH044518A (ja) * 1990-04-20 1992-01-09 Yazaki Corp 誘導防止テープ電線
CN116631916B (zh) * 2023-07-14 2024-01-12 深圳快捷芯半导体有限公司 一种半导体硅片局部掺杂装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2860251A (en) * 1953-10-15 1958-11-11 Rauland Corp Apparatus for manufacturing semi-conductor devices
NL276412A (en:Method) * 1961-03-30
US3684904A (en) * 1969-04-24 1972-08-15 Gennady Vasilievich Galutva Device for precision displacement of a solid body
US3887811A (en) * 1971-10-08 1975-06-03 Radiant Energy Systems Electro mechanical alignment apparatus for electron image projection systems

Also Published As

Publication number Publication date
DE2556456C2 (de) 1987-04-09
CH607330A5 (en:Method) 1978-12-15
JPS5194773A (en:Method) 1976-08-19
DE2556456A1 (de) 1976-08-19
US3951695A (en) 1976-04-20
JPS5838932B2 (ja) 1983-08-26

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee