GB1506380A - Gold plating electrolyte and method of electrodepositing gold in the production of semiconductor devices - Google Patents

Gold plating electrolyte and method of electrodepositing gold in the production of semiconductor devices

Info

Publication number
GB1506380A
GB1506380A GBGB52520/74A GB5252074A GB1506380A GB 1506380 A GB1506380 A GB 1506380A GB 5252074 A GB5252074 A GB 5252074A GB 1506380 A GB1506380 A GB 1506380A
Authority
GB
United Kingdom
Prior art keywords
plating
gold
substrates
alkali metal
production
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GBGB52520/74A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BASF Catalysts UK Holdings Ltd
Original Assignee
Engelhard Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Engelhard Industries Ltd filed Critical Engelhard Industries Ltd
Priority to GBGB52520/74A priority Critical patent/GB1506380A/en
Priority to AU86740/75A priority patent/AU494806B2/en
Priority to NL7513699A priority patent/NL7513699A/en
Priority to AT908275A priority patent/ATA908275A/en
Priority to CH1566675A priority patent/CH606505A5/xx
Priority to IT52492/75A priority patent/IT1052476B/en
Priority to FR7536819A priority patent/FR2293500A1/en
Priority to DK545375A priority patent/DK545375A/en
Priority to ES443389A priority patent/ES443389A1/en
Priority to SE7513620A priority patent/SE7513620L/en
Priority to DE19752554583 priority patent/DE2554583A1/en
Priority to JP50143410A priority patent/JPS5198639A/en
Priority to BE162465A priority patent/BE836293A/en
Publication of GB1506380A publication Critical patent/GB1506380A/en
Priority to US05/931,643 priority patent/US4207149A/en
Priority to HK733/78A priority patent/HK73378A/en
Priority to MY19795A priority patent/MY7900005A/en
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/26Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L24/27Manufacturing methods
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D3/00Electroplating: Baths therefor
    • C25D3/02Electroplating: Baths therefor from solutions
    • C25D3/48Electroplating: Baths therefor from solutions of gold
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L24/83Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/83Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
    • H01L2224/8319Arrangement of the layer connectors prior to mounting
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/83Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
    • H01L2224/838Bonding techniques
    • H01L2224/83801Soldering or alloying
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01004Beryllium [Be]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01006Carbon [C]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01011Sodium [Na]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01015Phosphorus [P]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01019Potassium [K]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01032Germanium [Ge]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01033Arsenic [As]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01057Lanthanum [La]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01078Platinum [Pt]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01079Gold [Au]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01082Lead [Pb]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01084Polonium [Po]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/013Alloys
    • H01L2924/0132Binary Alloys
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/013Alloys
    • H01L2924/0132Binary Alloys
    • H01L2924/01322Eutectic Alloys, i.e. obtained by a liquid transforming into two solid phases
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10Details of semiconductor or other solid state devices to be connected
    • H01L2924/102Material of the semiconductor or solid state bodies
    • H01L2924/1025Semiconducting materials
    • H01L2924/10251Elemental semiconductors, i.e. Group IV
    • H01L2924/10253Silicon [Si]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10Details of semiconductor or other solid state devices to be connected
    • H01L2924/11Device type
    • H01L2924/14Integrated circuits

Abstract

1506380 Gold electro-plating ENGELHARD INDUSTRIES Ltd 21 Nov 1975 [4 Dec 1974] 52520/74 Heading C7B An aqueous gold plating electrolyte solution, for plating Ni-Fe substrates, e.g. transistor headers or integrated circuit flat pack lead frames employed in producing semi-conductor devices, to permit bonding of Ge or Si chips or slices to the substrates, consists of water, Au e.g. 1 to 100 g/l as an alkali metal (preferably K) Au(CN) 2 , at least one conducting compound e.g. in total 1 to 200 g/l selected from alkali metal (e.g. Na or K) acetate, (tetra or meta) borate, orthophosphate, nitrate sulphamate, sulphate, tartrate, thiocyanate, thiosulphate and boric acid, and if required a buffer salt e.g. 1 to 200 g/l K or ammonium H 2 PO 4 . Preferably the solution has a pH 4 to 8 and density 2 to 12 degrees BÚ. Plating may be effected at a cathode CD of 1 to 2000 ASF and at 20 to 90‹C with vigorous agitation. The electrolyte may be applied only to selected areas of the substrate as a high velocity jet.
GBGB52520/74A 1974-12-04 1974-12-04 Gold plating electrolyte and method of electrodepositing gold in the production of semiconductor devices Expired GB1506380A (en)

Priority Applications (16)

Application Number Priority Date Filing Date Title
GBGB52520/74A GB1506380A (en) 1974-12-04 1974-12-04 Gold plating electrolyte and method of electrodepositing gold in the production of semiconductor devices
AU86740/75A AU494806B2 (en) 1974-12-04 1975-11-19 Gold plating electrolyte and method of electrodepositing goldin the production of semiconductor devices
NL7513699A NL7513699A (en) 1974-12-04 1975-11-24 IMPROVEMENTS IN AND WITH REGARD TO THE MANUFACTURE OF SEMICONDUCTOR DEVICES.
AT908275A ATA908275A (en) 1974-12-04 1975-11-28 METHOD FOR QUICKLY GALVANIC DEPOSITING GOLD FROM A GOLD ELECTROLYTE ON A PAD AND AQUATIC GOLD GALVANIZING ELECTROLYTE FOR CARRYING OUT THE PROCEDURE
CH1566675A CH606505A5 (en) 1974-12-04 1975-12-02
IT52492/75A IT1052476B (en) 1974-12-04 1975-12-02 ELECTROLYTE AND METHOD TO PRODUCE SEMICONDUCTIVE DEVICES AS WELL AS OBTAINED PRODUCTS
FR7536819A FR2293500A1 (en) 1974-12-04 1975-12-02 IMPROVEMENTS IN THE MANUFACTURING OF SEMICONDUCTOR DEVICES
DK545375A DK545375A (en) 1974-12-04 1975-12-03 METHODS OF MANUFACTURING SEMICONDUCTORS
ES443389A ES443389A1 (en) 1974-12-04 1975-12-03 Gold plating electrolyte and method of electrodepositing gold in the production of semiconductor devices
SE7513620A SE7513620L (en) 1974-12-04 1975-12-03 GOLD ELECTROLYTE
DE19752554583 DE2554583A1 (en) 1974-12-04 1975-12-04 GOLD ELECTROLYTE AND ITS USES
JP50143410A JPS5198639A (en) 1974-12-04 1975-12-04 Kindenkimetsukiho narabini sonodenkaieki
BE162465A BE836293A (en) 1974-12-04 1975-12-04 GOLD ELECTROLYTE
US05/931,643 US4207149A (en) 1974-12-04 1978-08-07 Gold electroplating solutions and processes
HK733/78A HK73378A (en) 1974-12-04 1978-12-14 Gold plating electrolyte and method of electrodepositing gold in the production of semiconductor devices
MY19795A MY7900005A (en) 1974-12-04 1979-12-31 Gold plating electrolyte and method of electrodepositing gold in the production of semi conductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GBGB52520/74A GB1506380A (en) 1974-12-04 1974-12-04 Gold plating electrolyte and method of electrodepositing gold in the production of semiconductor devices

Publications (1)

Publication Number Publication Date
GB1506380A true GB1506380A (en) 1978-04-05

Family

ID=10464233

Family Applications (1)

Application Number Title Priority Date Filing Date
GBGB52520/74A Expired GB1506380A (en) 1974-12-04 1974-12-04 Gold plating electrolyte and method of electrodepositing gold in the production of semiconductor devices

Country Status (14)

Country Link
JP (1) JPS5198639A (en)
AT (1) ATA908275A (en)
BE (1) BE836293A (en)
CH (1) CH606505A5 (en)
DE (1) DE2554583A1 (en)
DK (1) DK545375A (en)
ES (1) ES443389A1 (en)
FR (1) FR2293500A1 (en)
GB (1) GB1506380A (en)
HK (1) HK73378A (en)
IT (1) IT1052476B (en)
MY (1) MY7900005A (en)
NL (1) NL7513699A (en)
SE (1) SE7513620L (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4465564A (en) * 1983-06-27 1984-08-14 American Chemical & Refining Company, Inc. Gold plating bath containing tartrate and carbonate salts

Also Published As

Publication number Publication date
DK545375A (en) 1976-06-05
ES443389A1 (en) 1977-05-01
BE836293A (en) 1976-06-04
FR2293500B1 (en) 1980-08-01
FR2293500A1 (en) 1976-07-02
JPS5198639A (en) 1976-08-31
ATA908275A (en) 1978-10-15
AU8674075A (en) 1977-05-26
NL7513699A (en) 1976-06-09
MY7900005A (en) 1979-12-31
DE2554583A1 (en) 1976-06-10
IT1052476B (en) 1981-06-20
SE7513620L (en) 1976-06-08
CH606505A5 (en) 1978-10-31
HK73378A (en) 1978-12-22

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Legal Events

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PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee