GB1494328A - Process for thinning silicon with special application to producing silicon on insulator - Google Patents

Process for thinning silicon with special application to producing silicon on insulator

Info

Publication number
GB1494328A
GB1494328A GB52467/74A GB5246774A GB1494328A GB 1494328 A GB1494328 A GB 1494328A GB 52467/74 A GB52467/74 A GB 52467/74A GB 5246774 A GB5246774 A GB 5246774A GB 1494328 A GB1494328 A GB 1494328A
Authority
GB
United Kingdom
Prior art keywords
layer
forming
silicon
etching
dec
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB52467/74A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Texas Instruments Inc
Original Assignee
Texas Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Texas Instruments Inc filed Critical Texas Instruments Inc
Publication of GB1494328A publication Critical patent/GB1494328A/en
Expired legal-status Critical Current

Links

Classifications

    • H10W10/019—
    • H10P50/642—
    • H10W10/10—

Landscapes

  • Weting (AREA)
  • Element Separation (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Bipolar Transistors (AREA)
GB52467/74A 1973-12-28 1974-12-04 Process for thinning silicon with special application to producing silicon on insulator Expired GB1494328A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US42922873A 1973-12-28 1973-12-28

Publications (1)

Publication Number Publication Date
GB1494328A true GB1494328A (en) 1977-12-07

Family

ID=23702356

Family Applications (1)

Application Number Title Priority Date Filing Date
GB52467/74A Expired GB1494328A (en) 1973-12-28 1974-12-04 Process for thinning silicon with special application to producing silicon on insulator

Country Status (4)

Country Link
JP (1) JPS5828731B2 (cg-RX-API-DMAC10.html)
DE (1) DE2460653C2 (cg-RX-API-DMAC10.html)
FR (1) FR2256537B1 (cg-RX-API-DMAC10.html)
GB (1) GB1494328A (cg-RX-API-DMAC10.html)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54110783A (en) * 1978-02-20 1979-08-30 Hitachi Ltd Semiconductor substrate and its manufacture
DE3300400A1 (de) 1982-01-06 1983-07-14 Canon K.K., Tokyo Halbleiterbauelement
JPS6066825A (ja) * 1983-09-22 1985-04-17 Toshiba Corp 半導体装置の製造方法
US5416354A (en) * 1989-01-06 1995-05-16 Unitrode Corporation Inverted epitaxial process semiconductor devices
DE3922671A1 (de) * 1989-07-10 1991-01-24 Siemens Ag Akustoelektronisches bauelement mit einer oberflaechenwellenanordnung und einer elektronischen halbleiterschaltung

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4936792B1 (cg-RX-API-DMAC10.html) * 1970-10-15 1974-10-03

Also Published As

Publication number Publication date
JPS5828731B2 (ja) 1983-06-17
FR2256537A1 (cg-RX-API-DMAC10.html) 1975-07-25
JPS5099272A (cg-RX-API-DMAC10.html) 1975-08-06
DE2460653A1 (de) 1975-07-10
FR2256537B1 (cg-RX-API-DMAC10.html) 1979-03-16
DE2460653C2 (de) 1986-02-06

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PE20 Patent expired after termination of 20 years

Effective date: 19941203