GB1485183A - Integrated circuit devices and their fabrication - Google Patents

Integrated circuit devices and their fabrication

Info

Publication number
GB1485183A
GB1485183A GB1031/75A GB103175A GB1485183A GB 1485183 A GB1485183 A GB 1485183A GB 1031/75 A GB1031/75 A GB 1031/75A GB 103175 A GB103175 A GB 103175A GB 1485183 A GB1485183 A GB 1485183A
Authority
GB
United Kingdom
Prior art keywords
level
metallization
dielectric mask
semi
integrated circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB1031/75A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AT&T Corp
Original Assignee
Western Electric Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Western Electric Co Inc filed Critical Western Electric Co Inc
Publication of GB1485183A publication Critical patent/GB1485183A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W10/00—Isolation regions in semiconductor bodies between components of integrated devices
    • H10W10/01—Manufacture or treatment
    • H10W10/011—Manufacture or treatment of isolation regions comprising dielectric materials
    • H10W10/012—Manufacture or treatment of isolation regions comprising dielectric materials using local oxidation of silicon [LOCOS]
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W10/00—Isolation regions in semiconductor bodies between components of integrated devices
    • H10W10/01—Manufacture or treatment
    • H10W10/011—Manufacture or treatment of isolation regions comprising dielectric materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W10/00—Isolation regions in semiconductor bodies between components of integrated devices
    • H10W10/10—Isolation regions comprising dielectric materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W10/00—Isolation regions in semiconductor bodies between components of integrated devices
    • H10W10/10—Isolation regions comprising dielectric materials
    • H10W10/13—Isolation regions comprising dielectric materials formed using local oxidation of silicon [LOCOS], e.g. sealed interface localised oxidation [SILO] or side-wall mask isolation [SWAMI]
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/40—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes

Landscapes

  • Element Separation (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Bipolar Integrated Circuits (AREA)
  • Bipolar Transistors (AREA)
GB1031/75A 1974-01-14 1975-01-10 Integrated circuit devices and their fabrication Expired GB1485183A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US43289674A 1974-01-14 1974-01-14

Publications (1)

Publication Number Publication Date
GB1485183A true GB1485183A (en) 1977-09-08

Family

ID=23718017

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1031/75A Expired GB1485183A (en) 1974-01-14 1975-01-10 Integrated circuit devices and their fabrication

Country Status (7)

Country Link
JP (1) JPS50104579A (enExample)
CA (1) CA1010157A (enExample)
DE (1) DE2500867A1 (enExample)
FR (1) FR2258001B1 (enExample)
GB (1) GB1485183A (enExample)
IT (1) IT1028309B (enExample)
NL (1) NL7500360A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2605641C3 (de) * 1976-02-12 1979-12-20 Siemens Ag, 1000 Berlin Und 8000 Muenchen Hochfrequenztransistor und Verfahren zu seiner Herstellung
FR2470444A1 (fr) * 1979-11-21 1981-05-29 Radiotechnique Compelec Perfectionnement au procede de realisation d'un reseau de connexions par anodisation localisee sur un support semi-conducteur

Also Published As

Publication number Publication date
FR2258001B1 (enExample) 1978-08-25
CA1010157A (en) 1977-05-10
NL7500360A (nl) 1975-07-16
FR2258001A1 (enExample) 1975-08-08
DE2500867A1 (de) 1975-07-24
JPS50104579A (enExample) 1975-08-18
IT1028309B (it) 1979-01-30

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee