GB1485183A - Integrated circuit devices and their fabrication - Google Patents
Integrated circuit devices and their fabricationInfo
- Publication number
- GB1485183A GB1485183A GB103175A GB103175A GB1485183A GB 1485183 A GB1485183 A GB 1485183A GB 103175 A GB103175 A GB 103175A GB 103175 A GB103175 A GB 103175A GB 1485183 A GB1485183 A GB 1485183A
- Authority
- GB
- United Kingdom
- Prior art keywords
- level
- metallization
- dielectric mask
- semi
- integrated circuit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004519 manufacturing process Methods 0.000 title abstract 3
- 238000001465 metallisation Methods 0.000 abstract 6
- 239000004065 semiconductor Substances 0.000 abstract 3
- 238000009792 diffusion process Methods 0.000 abstract 2
- 238000005468 ion implantation Methods 0.000 abstract 2
- 229910052710 silicon Inorganic materials 0.000 abstract 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 1
- 229910052785 arsenic Inorganic materials 0.000 abstract 1
- 239000002131 composite material Substances 0.000 abstract 1
- 238000005530 etching Methods 0.000 abstract 1
- 239000012535 impurity Substances 0.000 abstract 1
- 230000000873 masking effect Effects 0.000 abstract 1
- 230000003647 oxidation Effects 0.000 abstract 1
- 238000007254 oxidation reaction Methods 0.000 abstract 1
- 239000010703 silicon Substances 0.000 abstract 1
- 229910052814 silicon oxide Inorganic materials 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
- H01L21/76202—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using a local oxidation of silicon, e.g. LOCOS, SWAMI, SILO
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Element Separation (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Bipolar Integrated Circuits (AREA)
- Bipolar Transistors (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US43289674A | 1974-01-14 | 1974-01-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1485183A true GB1485183A (en) | 1977-09-08 |
Family
ID=23718017
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB103175A Expired GB1485183A (en) | 1974-01-14 | 1975-01-10 | Integrated circuit devices and their fabrication |
Country Status (7)
| Country | Link |
|---|---|
| JP (1) | JPS50104579A (enrdf_load_html_response) |
| CA (1) | CA1010157A (enrdf_load_html_response) |
| DE (1) | DE2500867A1 (enrdf_load_html_response) |
| FR (1) | FR2258001B1 (enrdf_load_html_response) |
| GB (1) | GB1485183A (enrdf_load_html_response) |
| IT (1) | IT1028309B (enrdf_load_html_response) |
| NL (1) | NL7500360A (enrdf_load_html_response) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2605641C3 (de) * | 1976-02-12 | 1979-12-20 | Siemens Ag, 1000 Berlin Und 8000 Muenchen | Hochfrequenztransistor und Verfahren zu seiner Herstellung |
| FR2470444A1 (fr) * | 1979-11-21 | 1981-05-29 | Radiotechnique Compelec | Perfectionnement au procede de realisation d'un reseau de connexions par anodisation localisee sur un support semi-conducteur |
-
1974
- 1974-09-19 CA CA209,524A patent/CA1010157A/en not_active Expired
-
1975
- 1975-01-10 IT IT1919175A patent/IT1028309B/it active
- 1975-01-10 GB GB103175A patent/GB1485183A/en not_active Expired
- 1975-01-10 DE DE19752500867 patent/DE2500867A1/de not_active Withdrawn
- 1975-01-13 NL NL7500360A patent/NL7500360A/xx not_active Application Discontinuation
- 1975-01-13 FR FR7500839A patent/FR2258001B1/fr not_active Expired
- 1975-01-14 JP JP599475A patent/JPS50104579A/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| NL7500360A (nl) | 1975-07-16 |
| CA1010157A (en) | 1977-05-10 |
| IT1028309B (it) | 1979-01-30 |
| FR2258001A1 (enrdf_load_html_response) | 1975-08-08 |
| DE2500867A1 (de) | 1975-07-24 |
| FR2258001B1 (enrdf_load_html_response) | 1978-08-25 |
| JPS50104579A (enrdf_load_html_response) | 1975-08-18 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PS | Patent sealed | ||
| PCNP | Patent ceased through non-payment of renewal fee |