GB1472099A - Method of transferring positioning and exposing semiconductor slices in a positioning and contact printing machine - Google Patents
Method of transferring positioning and exposing semiconductor slices in a positioning and contact printing machineInfo
- Publication number
- GB1472099A GB1472099A GB5564174A GB5564174A GB1472099A GB 1472099 A GB1472099 A GB 1472099A GB 5564174 A GB5564174 A GB 5564174A GB 5564174 A GB5564174 A GB 5564174A GB 1472099 A GB1472099 A GB 1472099A
- Authority
- GB
- United Kingdom
- Prior art keywords
- slice
- stencil
- mount
- positioning
- plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H10P72/00—
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DD175904A DD109125A1 (cg-RX-API-DMAC10.html) | 1974-01-09 | 1974-01-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1472099A true GB1472099A (en) | 1977-04-27 |
Family
ID=5494267
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB5564174A Expired GB1472099A (en) | 1974-01-09 | 1974-12-23 | Method of transferring positioning and exposing semiconductor slices in a positioning and contact printing machine |
Country Status (5)
| Country | Link |
|---|---|
| CS (1) | CS177580B1 (cg-RX-API-DMAC10.html) |
| DD (1) | DD109125A1 (cg-RX-API-DMAC10.html) |
| DE (1) | DE2455817A1 (cg-RX-API-DMAC10.html) |
| FR (1) | FR2257146B3 (cg-RX-API-DMAC10.html) |
| GB (1) | GB1472099A (cg-RX-API-DMAC10.html) |
-
1974
- 1974-01-09 DD DD175904A patent/DD109125A1/xx unknown
- 1974-11-26 DE DE19742455817 patent/DE2455817A1/de not_active Withdrawn
- 1974-12-23 GB GB5564174A patent/GB1472099A/en not_active Expired
- 1974-12-23 FR FR7442561A patent/FR2257146B3/fr not_active Expired
-
1975
- 1975-01-09 CS CS178A patent/CS177580B1/cs unknown
Also Published As
| Publication number | Publication date |
|---|---|
| DD109125A1 (cg-RX-API-DMAC10.html) | 1974-10-12 |
| FR2257146B3 (cg-RX-API-DMAC10.html) | 1977-09-23 |
| DE2455817A1 (de) | 1975-07-17 |
| CS177580B1 (cg-RX-API-DMAC10.html) | 1977-07-29 |
| FR2257146A1 (cg-RX-API-DMAC10.html) | 1975-08-01 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PS | Patent sealed [section 19, patents act 1949] | ||
| PCNP | Patent ceased through non-payment of renewal fee |