GB1468462A - Low leakage vacuum valve - Google Patents

Low leakage vacuum valve

Info

Publication number
GB1468462A
GB1468462A GB804574A GB804574A GB1468462A GB 1468462 A GB1468462 A GB 1468462A GB 804574 A GB804574 A GB 804574A GB 804574 A GB804574 A GB 804574A GB 1468462 A GB1468462 A GB 1468462A
Authority
GB
United Kingdom
Prior art keywords
rotor
chamber
bore
roughing pump
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB804574A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of GB1468462A publication Critical patent/GB1468462A/en
Expired legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
    • C23C14/566—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases using a load-lock chamber
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/86493—Multi-way valve unit
    • Y10T137/86815—Multiple inlet with single outlet
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/86493—Multi-way valve unit
    • Y10T137/86863—Rotary valve unit
    • Y10T137/86871—Plug

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Analytical Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physical Vapour Deposition (AREA)
  • Particle Accelerators (AREA)
  • Taps Or Cocks (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Sliding Valves (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

1468462 Valves N B BROOKS 21 Feb 1974 8045/74 Heading F2V [Also in Division H1] A rotary cock suitable for passing semiconductor wafers into a high vacuum chamber for ion beam implantation has a cylindrical rotor 14 with a transverse rectangular sectioned bore 22 therethrough. The rotor is spaced from the walls of the bore of the body to form a chamber 28, which is sealed at its ends by 0-rings 18, 20, and is connected by radial passages 36 to passages 34 that are connected to a vacuum roughing pump to reduce the leakage across the rotor. In use the chamber 28 is maintained at a vacuum intermediate the high vacuum and atmosphere. In a modification the rotor or the chamber 28 is provided with grooves which connect with an end chamber that is connected to the roughing pump by a passage in the body at the end of the chamber. In a further modification the transverse bore 22 in the rotor is connected directly to the roughing pump by a passage axially of the rotor.
GB804574A 1973-02-21 1974-02-21 Low leakage vacuum valve Expired GB1468462A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US33445573 US3833018A (en) 1973-02-21 1973-02-21 Low leakage vacuum valve and chamber using same

Publications (1)

Publication Number Publication Date
GB1468462A true GB1468462A (en) 1977-03-30

Family

ID=23307287

Family Applications (1)

Application Number Title Priority Date Filing Date
GB804574A Expired GB1468462A (en) 1973-02-21 1974-02-21 Low leakage vacuum valve

Country Status (6)

Country Link
US (1) US3833018A (en)
JP (1) JPS5833658B2 (en)
CA (1) CA1016560A (en)
DE (1) DE2408406C3 (en)
FR (1) FR2224684B1 (en)
GB (1) GB1468462A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2193731A (en) * 1986-07-23 1988-02-17 Boc Group Inc Wafer processing apparatus having wafer transporting and storage means
US8833383B2 (en) 2011-07-20 2014-09-16 Ferrotec (Usa) Corporation Multi-vane throttle valve

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4030622A (en) * 1975-05-23 1977-06-21 Pass-Port Systems, Inc. Wafer transport system
US4498832A (en) * 1982-05-21 1985-02-12 The Boc Group, Inc. Workpiece accumulating and transporting apparatus
US4544317A (en) * 1984-04-16 1985-10-01 International Business Machines Corporation Vacuum-to-vacuum entry system apparatus
JPH0218836U (en) * 1988-07-26 1990-02-07
IT1242958B (en) * 1990-06-21 1994-05-18 Dall Argine & Ghiretti S R L DEVICE FOR THE PASSAGE OF OBJECTS BETWEEN TWO MUTUAL SEPARATE ENVIRONMENTS WITH SEAL IN PARTICULAR FOR STERILIZATION OR PASTEURIZATION PLANTS
EP0995812A1 (en) 1998-10-13 2000-04-26 Vacumetal B.V. Apparatus for flow-line treatment of articles in an artificial medium
US7204821B1 (en) * 2000-01-31 2007-04-17 Ethicon, Inc. Surgical fluid management system with suction control
US6595957B1 (en) 2000-01-31 2003-07-22 Ethicon, Inc. Surgical fluid management system with a dampening chamber
US6135138A (en) * 2000-02-01 2000-10-24 Raytheon Company Rotary coupler for fluid conduits
SG11201810635YA (en) * 2016-06-02 2018-12-28 Applied Materials Inc Gate valve for continuous tow processing

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE558787C (en) * 1928-11-22 1932-09-12 Elektrowerke Akt Ges Control device for taps serving as a quick-closing device
BE429854A (en) * 1937-08-24
US2516908A (en) * 1945-09-24 1950-08-01 American Can Co Apparatus for lining can ends
US2845191A (en) * 1957-02-05 1958-07-29 Lever Brothers Ltd Air lock device
US3260383A (en) * 1964-08-04 1966-07-12 Vacuum Processes Inc Method and apparatus for loading and unloading a high vacuum process chamber
DE1450586B2 (en) * 1964-08-14 1971-12-16 Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V., 8000 München VENTILABLE VALVE FOR LARGE PRESSURE DIFFERENCES
US3340176A (en) * 1965-07-28 1967-09-05 Western Electric Co Vacuum processing machine
US3473550A (en) * 1967-03-29 1969-10-21 Helmerich & Payne Pig diverter
US3554114A (en) * 1968-03-07 1971-01-12 P & S Rice Mills Inc Apparatus for introducing materials into or removing materials from a hermetically sealed vessel
GB1284262A (en) * 1968-09-09 1972-08-02 Unilever Ltd A device for passing a product between zones of different pressure
US3652444A (en) * 1969-10-24 1972-03-28 Ibm Continuous vacuum process apparatus
US3692041A (en) * 1971-01-04 1972-09-19 Gen Electric Variable flow distributor
US3674160A (en) * 1971-04-08 1972-07-04 Heinz Co H J Apparatus for transferring can lids through a partition subject to a pressure differential

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2193731A (en) * 1986-07-23 1988-02-17 Boc Group Inc Wafer processing apparatus having wafer transporting and storage means
US8833383B2 (en) 2011-07-20 2014-09-16 Ferrotec (Usa) Corporation Multi-vane throttle valve

Also Published As

Publication number Publication date
DE2408406B2 (en) 1980-12-11
FR2224684A1 (en) 1974-10-31
JPS5041129A (en) 1975-04-15
FR2224684B1 (en) 1978-01-06
DE2408406C3 (en) 1981-08-27
JPS5833658B2 (en) 1983-07-21
CA1016560A (en) 1977-08-30
US3833018A (en) 1974-09-03
DE2408406A1 (en) 1974-08-22

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee