GB1468446A - Photo-etching - Google Patents

Photo-etching

Info

Publication number
GB1468446A
GB1468446A GB3552974A GB3552974A GB1468446A GB 1468446 A GB1468446 A GB 1468446A GB 3552974 A GB3552974 A GB 3552974A GB 3552974 A GB3552974 A GB 3552974A GB 1468446 A GB1468446 A GB 1468446A
Authority
GB
United Kingdom
Prior art keywords
chamber
resist
layer
etching
laminate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB3552974A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rio Tinto Switzerland AG
Original Assignee
Alusuisse Holdings AG
Schweizerische Aluminium AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alusuisse Holdings AG, Schweizerische Aluminium AG filed Critical Alusuisse Holdings AG
Publication of GB1468446A publication Critical patent/GB1468446A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2002—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
    • G03F7/2014—Contact or film exposure of light sensitive plates such as lithographic plates or circuit boards, e.g. in a vacuum frame
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Weting (AREA)
GB3552974A 1973-08-13 1974-08-13 Photo-etching Expired GB1468446A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19732340961 DE2340961A1 (de) 1973-08-13 1973-08-13 Vorrichtung zum herstellen von graphischen mustern

Publications (1)

Publication Number Publication Date
GB1468446A true GB1468446A (en) 1977-03-23

Family

ID=5889638

Family Applications (1)

Application Number Title Priority Date Filing Date
GB3552974A Expired GB1468446A (en) 1973-08-13 1974-08-13 Photo-etching

Country Status (18)

Country Link
US (1) US3973847A (https=)
JP (1) JPS5046134A (https=)
AU (1) AU7218474A (https=)
BE (1) BE818654A (https=)
CA (1) CA1004776A (https=)
CH (1) CH589312A5 (https=)
DE (1) DE2340961A1 (https=)
DK (1) DK427174A (https=)
ES (1) ES428461A1 (https=)
FI (1) FI237274A7 (https=)
FR (1) FR2241098A1 (https=)
GB (1) GB1468446A (https=)
IT (1) IT1019922B (https=)
LU (1) LU70729A1 (https=)
NL (1) NL7409331A (https=)
NO (1) NO742890L (https=)
SE (1) SE7410270L (https=)
ZA (1) ZA744464B (https=)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4197000A (en) * 1978-05-23 1980-04-08 Fsi Corporation Positive developing method and apparatus
US4286541A (en) * 1979-07-26 1981-09-01 Fsi Corporation Applying photoresist onto silicon wafers
US4536085A (en) * 1984-01-27 1985-08-20 Teaneck Graphics Corp. Multiple vacuum frame unit
DE3734097A1 (de) * 1987-10-09 1989-04-27 Du Pont Deutschland Verfahren und vorrichtung zum behandeln eines photographischen aufzeichnungsmaterials
DE102004049131A1 (de) * 2004-10-07 2006-04-13 Wahrig, Johannes Blasinstrumente

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3528358A (en) * 1966-04-19 1970-09-15 Ball Corp Printing plate processing apparatus
US3751164A (en) * 1969-06-06 1973-08-07 Grace W R & Co Automated apparatus for photocomposing

Also Published As

Publication number Publication date
DE2340961A1 (de) 1975-02-27
ES428461A1 (es) 1976-08-16
NO742890L (https=) 1975-03-10
JPS5046134A (https=) 1975-04-24
NL7409331A (nl) 1975-02-17
LU70729A1 (https=) 1974-12-10
ZA744464B (en) 1975-07-30
DK427174A (https=) 1975-04-14
CH589312A5 (https=) 1977-06-30
US3973847A (en) 1976-08-10
FI237274A7 (https=) 1975-02-14
FR2241098A1 (https=) 1975-03-14
IT1019922B (it) 1977-11-30
BE818654A (fr) 1974-12-02
CA1004776A (en) 1977-02-01
SE7410270L (https=) 1975-02-14
AU7218474A (en) 1976-02-12

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee