GB1463795A - Local surface analysis - Google Patents
Local surface analysisInfo
- Publication number
- GB1463795A GB1463795A GB2698375A GB2698375A GB1463795A GB 1463795 A GB1463795 A GB 1463795A GB 2698375 A GB2698375 A GB 2698375A GB 2698375 A GB2698375 A GB 2698375A GB 1463795 A GB1463795 A GB 1463795A
- Authority
- GB
- United Kingdom
- Prior art keywords
- chamber
- particles
- surface analysis
- rhenium
- june
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005211 surface analysis Methods 0.000 title abstract 3
- 239000002245 particle Substances 0.000 abstract 4
- 229910052702 rhenium Inorganic materials 0.000 abstract 2
- WUAPFZMCVAUBPE-UHFFFAOYSA-N rhenium atom Chemical compound [Re] WUAPFZMCVAUBPE-UHFFFAOYSA-N 0.000 abstract 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 abstract 1
- 239000012809 cooling fluid Substances 0.000 abstract 1
- 229910052802 copper Inorganic materials 0.000 abstract 1
- 239000010949 copper Substances 0.000 abstract 1
- 238000003795 desorption Methods 0.000 abstract 1
- 238000010494 dissociation reaction Methods 0.000 abstract 1
- 230000005593 dissociations Effects 0.000 abstract 1
- 238000010884 ion-beam technique Methods 0.000 abstract 1
- 150000002500 ions Chemical class 0.000 abstract 1
- 229910052751 metal Inorganic materials 0.000 abstract 1
- 239000002184 metal Substances 0.000 abstract 1
- 229910052760 oxygen Inorganic materials 0.000 abstract 1
- 239000001301 oxygen Substances 0.000 abstract 1
- -1 oxygen ions Chemical class 0.000 abstract 1
- 230000005855 radiation Effects 0.000 abstract 1
- 238000001179 sorption measurement Methods 0.000 abstract 1
- 238000004544 sputter deposition Methods 0.000 abstract 1
- 229910052715 tantalum Inorganic materials 0.000 abstract 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 abstract 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 abstract 1
- 229910052721 tungsten Inorganic materials 0.000 abstract 1
- 239000010937 tungsten Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/10—Ion sources; Ion guns
- H01J49/16—Ion sources; Ion guns using surface ionisation, e.g. field-, thermionic- or photo-emission
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Electron Tubes For Measurement (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR7422722A FR2279093A1 (fr) | 1974-06-28 | 1974-06-28 | Procede et dispositif d'analyse chimique locale des solides |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1463795A true GB1463795A (en) | 1977-02-09 |
Family
ID=9140694
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB2698375A Expired GB1463795A (en) | 1974-06-28 | 1975-06-25 | Local surface analysis |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US4001582A (enExample) |
| JP (1) | JPS5812980B2 (enExample) |
| CH (1) | CH591079A5 (enExample) |
| DE (1) | DE2528596A1 (enExample) |
| FR (1) | FR2279093A1 (enExample) |
| GB (1) | GB1463795A (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2157485A (en) * | 1984-03-28 | 1985-10-23 | Ion Tech Ltd | A method of mass spectrometer analysis |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2739829C2 (de) * | 1977-09-03 | 1986-04-10 | Gesellschaft für Strahlen- und Umweltforschung mbH, 8000 München | Anordnung zur Analyse einer Probenschicht durch Beschuß mit elektromagnetischer Strahlung |
| JP2640935B2 (ja) * | 1983-12-23 | 1997-08-13 | エス・ア−ル・アイ・インタ−ナシヨナル | 表面の検査方法および装置 |
| US6995847B2 (en) | 2002-05-24 | 2006-02-07 | Honeywell International Inc. | Methods and systems for substrate surface evaluation |
| US20060026807A1 (en) * | 2003-08-07 | 2006-02-09 | Carnevali Jeffrey D | Quick release mounting apparatus |
| US20100306941A1 (en) * | 2009-06-03 | 2010-12-09 | Hayco Manufacturing Limited | Toothbrush |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR1402020A (fr) * | 1964-04-27 | 1965-06-11 | Csf | Perfectionnements aux sources d'ions |
| GB1210218A (en) * | 1967-02-08 | 1970-10-28 | Ass Elect Ind | Improvements relating to ion probe target analysis |
| US3660655A (en) * | 1969-09-08 | 1972-05-02 | Ass Elect Ind | Ion probe with means for mass analyzing neutral particles sputtered from a specimen |
| US3864575A (en) * | 1970-07-25 | 1975-02-04 | Nujeeb Hashmi | Contact ionization ion source |
| US3770954A (en) * | 1971-12-29 | 1973-11-06 | Gen Electric | Method and apparatus for analysis of impurities in air and other gases |
-
1974
- 1974-06-28 FR FR7422722A patent/FR2279093A1/fr active Granted
-
1975
- 1975-06-19 CH CH797275A patent/CH591079A5/xx not_active IP Right Cessation
- 1975-06-20 US US05/588,706 patent/US4001582A/en not_active Expired - Lifetime
- 1975-06-25 GB GB2698375A patent/GB1463795A/en not_active Expired
- 1975-06-26 DE DE19752528596 patent/DE2528596A1/de not_active Ceased
- 1975-06-28 JP JP50080468A patent/JPS5812980B2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2157485A (en) * | 1984-03-28 | 1985-10-23 | Ion Tech Ltd | A method of mass spectrometer analysis |
Also Published As
| Publication number | Publication date |
|---|---|
| FR2279093B1 (enExample) | 1979-08-03 |
| FR2279093A1 (fr) | 1976-02-13 |
| JPS5124292A (en) | 1976-02-27 |
| DE2528596A1 (de) | 1976-01-15 |
| US4001582A (en) | 1977-01-04 |
| JPS5812980B2 (ja) | 1983-03-11 |
| CH591079A5 (enExample) | 1977-08-31 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PS | Patent sealed [section 19, patents act 1949] | ||
| PCNP | Patent ceased through non-payment of renewal fee |