GB1448298A - Electron spectrometers for x-ray induced photo-electron spectroscopy - Google Patents

Electron spectrometers for x-ray induced photo-electron spectroscopy

Info

Publication number
GB1448298A
GB1448298A GB2281374A GB2281374A GB1448298A GB 1448298 A GB1448298 A GB 1448298A GB 2281374 A GB2281374 A GB 2281374A GB 2281374 A GB2281374 A GB 2281374A GB 1448298 A GB1448298 A GB 1448298A
Authority
GB
United Kingdom
Prior art keywords
electron
chamber
gas
torr
rays
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB2281374A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
GCA Corp
Original Assignee
GCA Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by GCA Corp filed Critical GCA Corp
Publication of GB1448298A publication Critical patent/GB1448298A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
    • H01J49/484—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter with spherical mirrors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/16—Vessels; Containers; Shields associated therewith
    • H01J35/18—Windows
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter

Abstract

1448298 X-ray sources GCA CORP 22 May 1974 [23 May 1973] 22813/74 Heading H1D A source of X-rays for bombarding a sample 25 to produce photo-electrons which are subsequently analysed, comprises a chamber 37 into which a gas such as neon can be introduced and a second chamber 40 which is continuously evacuated and contains an electron gun 39 producing an electron beam, having an energy sufficient to eject electrons from a non-valence level in the gas, which beam passes through a fine aperture 43 into chamber 37 where impact with the gas produces X-rays which are transmitted through an aluminium or beryllium window 63. A continuously evacuated intermediate chamber 41 is optional. An electron trap and heat sink can be cooled by the flow of water through ports 51, 53. The pressures in chambers 37, 41, 40 can be respectively 10<SP>-2</SP> to 1 torr, 10<SP>-1</SP> and 10<SP>-5</SP> torr.
GB2281374A 1973-05-23 1974-05-22 Electron spectrometers for x-ray induced photo-electron spectroscopy Expired GB1448298A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US363141A US3870882A (en) 1973-05-23 1973-05-23 Esca x-ray source

Publications (1)

Publication Number Publication Date
GB1448298A true GB1448298A (en) 1976-09-02

Family

ID=23428992

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2281374A Expired GB1448298A (en) 1973-05-23 1974-05-22 Electron spectrometers for x-ray induced photo-electron spectroscopy

Country Status (4)

Country Link
US (1) US3870882A (en)
JP (1) JPS5042790A (en)
DE (1) DE2424848A1 (en)
GB (1) GB1448298A (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4042827A (en) * 1973-10-03 1977-08-16 Research Corporation Stimulated emission X-ray generator
JPS5937540B2 (en) * 1974-09-06 1984-09-10 株式会社日立製作所 Field emission scanning electron microscope
US4119855A (en) * 1977-07-08 1978-10-10 Massachusetts Institute Of Technology Non vacuum soft x-ray lithographic source
EP0058137A3 (en) * 1981-02-09 1983-03-16 Battelle Development Corporation Apparatus for providing x-rays
ATE35577T1 (en) * 1982-04-14 1988-07-15 Battelle Development Corp X-RAY GENDER.
DE602005012945D1 (en) * 2005-07-20 2009-04-09 Zeiss Carl Sms Gmbh Particle beam exposure system and device for influencing the beam

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2797333A (en) * 1953-07-24 1957-06-25 Armour Res Found X-ray source
US3174036A (en) * 1961-10-04 1965-03-16 Alexeff Igor Measurement of ultra high vacua by electron bombardment and vacuum ultra violet radiation measurement
GB1131143A (en) * 1964-12-17 1968-10-23 British Cellophane Ltd An improved x-ray gauging apparatus
US3602686A (en) * 1967-04-11 1971-08-31 Westinghouse Electric Corp Electron-beam apparatus and method of welding with this apparatus
US3617741A (en) * 1969-09-02 1971-11-02 Hewlett Packard Co Electron spectroscopy system with a multiple electrode electron lens
US3681600A (en) * 1969-10-24 1972-08-01 Perkin Elmer Corp Retarding field electron spectrometer
GB1332207A (en) * 1971-05-07 1973-10-03 Ass Elect Ind Apparatus for charged particle spectroscopy
US3787692A (en) * 1971-05-17 1974-01-22 Varian Associates Induced electron emission spectrometer using plural radiation sources
US3699331A (en) * 1971-08-27 1972-10-17 Paul W Palmberg Double pass coaxial cylinder analyzer with retarding spherical grids

Also Published As

Publication number Publication date
DE2424848A1 (en) 1974-12-19
JPS5042790A (en) 1975-04-18
US3870882A (en) 1975-03-11

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee