GB1446015A - Corpuscular beam devices with adjustable object stages - Google Patents

Corpuscular beam devices with adjustable object stages

Info

Publication number
GB1446015A
GB1446015A GB3509173A GB3509173A GB1446015A GB 1446015 A GB1446015 A GB 1446015A GB 3509173 A GB3509173 A GB 3509173A GB 3509173 A GB3509173 A GB 3509173A GB 1446015 A GB1446015 A GB 1446015A
Authority
GB
United Kingdom
Prior art keywords
rod
carrier
jaws
cut out
cartridge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB3509173A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Max Planck Gesellschaft zur Foerderung der Wissenschaften eV
Original Assignee
Max Planck Gesellschaft zur Foerderung der Wissenschaften eV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19722236530 external-priority patent/DE2236530C3/de
Application filed by Max Planck Gesellschaft zur Foerderung der Wissenschaften eV filed Critical Max Planck Gesellschaft zur Foerderung der Wissenschaften eV
Publication of GB1446015A publication Critical patent/GB1446015A/en
Expired legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y15/00—Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Molecular Biology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Microscoopes, Condenser (AREA)
  • Sampling And Sample Adjustment (AREA)
GB3509173A 1972-07-21 1973-07-23 Corpuscular beam devices with adjustable object stages Expired GB1446015A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19722236530 DE2236530C3 (de) 1972-07-21 Objekteinstellvorrichtung für ein Korpuskularstrahlgerät, insbesondere ein Elektronenmikroskop

Publications (1)

Publication Number Publication Date
GB1446015A true GB1446015A (en) 1976-08-11

Family

ID=5851665

Family Applications (1)

Application Number Title Priority Date Filing Date
GB3509173A Expired GB1446015A (en) 1972-07-21 1973-07-23 Corpuscular beam devices with adjustable object stages

Country Status (3)

Country Link
JP (1) JPS4992973A (enExample)
GB (1) GB1446015A (enExample)
NL (1) NL7310177A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2825417C2 (de) * 1978-06-09 1980-08-07 Max-Planck-Gesellschaft Zur Foerderung Der Wissenschaften E.V., 3400 Goettingen Verfahren und Objekteinstellvorrichtung zum Einstellen eines Objektträgers bezüglich der Geräteachse eines Korpuskularstrahlgerätes

Also Published As

Publication number Publication date
DE2236530A1 (de) 1974-01-31
DE2236530B2 (de) 1975-07-10
JPS4992973A (enExample) 1974-09-04
NL7310177A (enExample) 1974-01-23

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Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee