GB1406894A - Method for etching tin oxide or indium oxide deposited on glass - Google Patents
Method for etching tin oxide or indium oxide deposited on glassInfo
- Publication number
- GB1406894A GB1406894A GB5443072A GB5443072A GB1406894A GB 1406894 A GB1406894 A GB 1406894A GB 5443072 A GB5443072 A GB 5443072A GB 5443072 A GB5443072 A GB 5443072A GB 1406894 A GB1406894 A GB 1406894A
- Authority
- GB
- United Kingdom
- Prior art keywords
- oxide
- layer
- indium
- glass
- masking
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000011521 glass Substances 0.000 title abstract 3
- 238000005530 etching Methods 0.000 title abstract 2
- 229910003437 indium oxide Inorganic materials 0.000 title abstract 2
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 title abstract 2
- 229910001887 tin oxide Inorganic materials 0.000 title abstract 2
- 238000000034 method Methods 0.000 title 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 title 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 abstract 2
- 238000000576 coating method Methods 0.000 abstract 2
- 239000003792 electrolyte Substances 0.000 abstract 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 abstract 2
- 239000010931 gold Substances 0.000 abstract 2
- 229910052737 gold Inorganic materials 0.000 abstract 2
- 230000000873 masking effect Effects 0.000 abstract 2
- 229910018487 Ni—Cr Inorganic materials 0.000 abstract 1
- 239000011248 coating agent Substances 0.000 abstract 1
- 238000000151 deposition Methods 0.000 abstract 1
- 229910052738 indium Inorganic materials 0.000 abstract 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 abstract 1
- 229920002120 photoresistant polymer Polymers 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1884—Manufacture of transparent electrodes, e.g. TCO, ITO
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1343—Electrodes
- G02F1/13439—Electrodes characterised by their electrical, optical, physical properties; materials therefor; method of making
Landscapes
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Organic Chemistry (AREA)
- Geochemistry & Mineralogy (AREA)
- Mathematical Physics (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Optics & Photonics (AREA)
- Materials Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Surface Treatment Of Glass (AREA)
- Liquid Crystal (AREA)
- ing And Chemical Polishing (AREA)
Abstract
1406894 Electrolytic removal of coatings of tin or indium oxide ING C OLIVETTI & C SpA 24 Nov 1972 [3 Dec 1971] 54430/72 Heading C7B A layer of a reducible oxide of tin or indium is selectively removed from a glass member by masking the surface thereof to leave exposed those areas of the oxide required to be removed, and cathodically reducing the oxide in an electrolyte of H 2 SO 4 and HCl, the reduced oxide then being dissolved by the electrolyte. Masking may be effected by vacuum depositing first a layer of Ni- Cr and then a layer of gold, coating with a photoresist, selectively exposing the photo-resist, and thereafter selectively etching the gold and Ni-Cr layers to expose those areas of the oxide required to be removed from the glass member.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| IT70973/71A IT943166B (en) | 1971-12-03 | 1971-12-03 | PROCEDURE FOR THE ELECTRO-LITHIC ATTACHMENT OF SAGNO OXIDE OR INDIUM OXIDE DEPOSITED ON GLASS |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1406894A true GB1406894A (en) | 1975-09-17 |
Family
ID=11314528
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB5443072A Expired GB1406894A (en) | 1971-12-03 | 1972-11-24 | Method for etching tin oxide or indium oxide deposited on glass |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JPS4865213A (en) |
| DE (1) | DE2259033A1 (en) |
| GB (1) | GB1406894A (en) |
| IT (1) | IT943166B (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4093504A (en) * | 1975-06-08 | 1978-06-06 | U.S. Philips Corporation | Method for producing electrically conductive indium oxide patterns on an insulating support by etching with hydrochloric acid and ferric chloride |
| US4368230A (en) * | 1979-03-28 | 1983-01-11 | Vlsi Technology Research Association | Photomask |
| EP0516757A1 (en) * | 1990-02-23 | 1992-12-09 | Roy Gerald Gordon | Electrolytic removal of tin oxide or titanium nitride from a coater. |
| EP1055016A1 (en) * | 1998-02-10 | 2000-11-29 | Feldman Technology Corporation | Method for etching |
| WO2020171793A3 (en) * | 2019-02-23 | 2020-09-24 | Aydeskin Mustafa | Method for removing coating from low-e glasses with electrically conductive coating |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3151557A1 (en) * | 1981-12-28 | 1983-07-21 | SWF-Spezialfabrik für Autozubehör Gustav Rau GmbH, 7120 Bietigheim-Bissingen | ELECTRO-OPTICAL DISPLAY DEVICE AND METHOD FOR THEIR PRODUCTION |
-
1971
- 1971-12-03 IT IT70973/71A patent/IT943166B/en active
-
1972
- 1972-11-24 GB GB5443072A patent/GB1406894A/en not_active Expired
- 1972-11-29 DE DE2259033A patent/DE2259033A1/en active Pending
- 1972-12-01 JP JP47119968A patent/JPS4865213A/ja active Pending
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4093504A (en) * | 1975-06-08 | 1978-06-06 | U.S. Philips Corporation | Method for producing electrically conductive indium oxide patterns on an insulating support by etching with hydrochloric acid and ferric chloride |
| US4368230A (en) * | 1979-03-28 | 1983-01-11 | Vlsi Technology Research Association | Photomask |
| EP0516757A1 (en) * | 1990-02-23 | 1992-12-09 | Roy Gerald Gordon | Electrolytic removal of tin oxide or titanium nitride from a coater. |
| EP0516757A4 (en) * | 1990-02-23 | 1993-06-30 | Roy Gerald Gordon | Electrolytic removal of tin oxide or titanium nitride from a coater |
| EP1055016A1 (en) * | 1998-02-10 | 2000-11-29 | Feldman Technology Corporation | Method for etching |
| EP1055016A4 (en) * | 1998-02-10 | 2005-09-21 | Feldman Technology Corp | Method for etching |
| US7115212B2 (en) | 1998-02-10 | 2006-10-03 | Feldman Technology Corporation | Method for etching |
| WO2020171793A3 (en) * | 2019-02-23 | 2020-09-24 | Aydeskin Mustafa | Method for removing coating from low-e glasses with electrically conductive coating |
Also Published As
| Publication number | Publication date |
|---|---|
| IT943166B (en) | 1973-04-02 |
| JPS4865213A (en) | 1973-09-08 |
| DE2259033A1 (en) | 1973-06-07 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PS | Patent sealed | ||
| PLNP | Patent lapsed through nonpayment of renewal fees |