GB1394062A - Semi-conductor devices - Google Patents

Semi-conductor devices

Info

Publication number
GB1394062A
GB1394062A GB4685071A GB4685071A GB1394062A GB 1394062 A GB1394062 A GB 1394062A GB 4685071 A GB4685071 A GB 4685071A GB 4685071 A GB4685071 A GB 4685071A GB 1394062 A GB1394062 A GB 1394062A
Authority
GB
United Kingdom
Prior art keywords
layer
nickel
chip
aperture
semi
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB4685071A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Lucas Electrical Co Ltd
Original Assignee
Lucas Electrical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lucas Electrical Co Ltd filed Critical Lucas Electrical Co Ltd
Priority to GB4685071A priority Critical patent/GB1394062A/en
Publication of GB1394062A publication Critical patent/GB1394062A/en
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/52Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
    • H01L23/522Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
    • H01L23/532Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body characterised by the materials
    • H01L23/53204Conductive materials
    • H01L23/53209Conductive materials based on metals, e.g. alloys, metal silicides
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01006Carbon [C]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01013Aluminum [Al]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01024Chromium [Cr]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01029Copper [Cu]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01033Arsenic [As]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01074Tungsten [W]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01078Platinum [Pt]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01079Gold [Au]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/013Alloys
    • H01L2924/014Solder alloys
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10Details of semiconductor or other solid state devices to be connected
    • H01L2924/102Material of the semiconductor or solid state bodies
    • H01L2924/1025Semiconducting materials
    • H01L2924/10251Elemental semiconductors, i.e. Group IV
    • H01L2924/10253Silicon [Si]

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Fuses (AREA)
  • Manufacturing Of Printed Wiring (AREA)

Abstract

1394062 Semi-conductor devices LUCAS ELECTRICAL CO Ltd 3 Oct 1972 [8 Oct 1971] 46850/71 Heading H1K A semi-conductor chip is provided with an upstanding metal land through which it may be soldered to a conductive substrate or a conductive land on an insulating substrate by the following method. The chip 11 (Fig. 2) e.g. of silicon is first provided with an aluminium layer 12, part of which is exposed through an aperture 14 in silica glass layer 13. A 500 Š thick layer 16 of chromium, titanium or tungsten and a 1000 Š layer 17 of nickel or copper are deposited to extend into the aperture and are covered with photoresist 18 which is exposed and developed to expose the part of layer 17 within aperture 14. The chip is then immersed in a nickel chloride plating bath and connected first as anode to clean the surface of layer 17 and then as cathode to deposit nickel 21, which is further built up by electroplating in a nickel sulphamate bath and then gold plated to prevent it tarnishing. After removal of the photoresist the layers 16, 17 where not protected by the nickel 21 are etched away in a mixture of ceric sulphate and sulphuric acid. The chip may then be mounted to an insulating substrate by inverting it to bring the land 21 and any other similar lands into contact with solder coated lands on the substrate and heating to fuse the solder.
GB4685071A 1971-10-08 1971-10-08 Semi-conductor devices Expired GB1394062A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB4685071A GB1394062A (en) 1971-10-08 1971-10-08 Semi-conductor devices

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB4685071A GB1394062A (en) 1971-10-08 1971-10-08 Semi-conductor devices

Publications (1)

Publication Number Publication Date
GB1394062A true GB1394062A (en) 1975-05-14

Family

ID=10442821

Family Applications (1)

Application Number Title Priority Date Filing Date
GB4685071A Expired GB1394062A (en) 1971-10-08 1971-10-08 Semi-conductor devices

Country Status (1)

Country Link
GB (1) GB1394062A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0178181A2 (en) * 1984-10-12 1986-04-16 Tektronix, Inc. Methods for producing an aperture in a surface
GB2194386A (en) * 1986-08-20 1988-03-02 Plessey Co Plc Solder bonded integrated circuit devices

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0178181A2 (en) * 1984-10-12 1986-04-16 Tektronix, Inc. Methods for producing an aperture in a surface
EP0178181A3 (en) * 1984-10-12 1987-08-19 Tektronix, Inc. Methods for producing an aperture in a surface
GB2194386A (en) * 1986-08-20 1988-03-02 Plessey Co Plc Solder bonded integrated circuit devices
GB2194386B (en) * 1986-08-20 1990-07-18 Plessey Co Plc Solder bonded integrated circuit devices

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Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee