GB1380074A - Optical alignment apparatus for projection printing system - Google Patents

Optical alignment apparatus for projection printing system

Info

Publication number
GB1380074A
GB1380074A GB5807671A GB5807671A GB1380074A GB 1380074 A GB1380074 A GB 1380074A GB 5807671 A GB5807671 A GB 5807671A GB 5807671 A GB5807671 A GB 5807671A GB 1380074 A GB1380074 A GB 1380074A
Authority
GB
United Kingdom
Prior art keywords
axis
positioning
plate
alignment apparatus
optical alignment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB5807671A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nippon Kogaku KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Kogaku KK filed Critical Nippon Kogaku KK
Publication of GB1380074A publication Critical patent/GB1380074A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Projection-Type Copiers In General (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
GB5807671A 1970-12-15 1971-12-14 Optical alignment apparatus for projection printing system Expired GB1380074A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP45111287A JPS509187B1 (enExample) 1970-12-15 1970-12-15

Publications (1)

Publication Number Publication Date
GB1380074A true GB1380074A (en) 1975-01-08

Family

ID=14557388

Family Applications (1)

Application Number Title Priority Date Filing Date
GB5807671A Expired GB1380074A (en) 1970-12-15 1971-12-14 Optical alignment apparatus for projection printing system

Country Status (4)

Country Link
JP (1) JPS509187B1 (enExample)
DE (1) DE2161746A1 (enExample)
FR (1) FR2118625A5 (enExample)
GB (1) GB1380074A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115480353A (zh) * 2022-09-16 2022-12-16 业成科技（成都）有限公司 光学对位方法及光学对位装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115480353A (zh) * 2022-09-16 2022-12-16 业成科技（成都）有限公司 光学对位方法及光学对位装置

Also Published As

Publication number Publication date
JPS509187B1 (enExample) 1975-04-10
FR2118625A5 (enExample) 1972-07-28
DE2161746A1 (de) 1972-07-06

Similar Documents

Publication Publication Date Title
EP0496891A4 (en) Method and device for optical exposure
JPS6324618A (ja) 露光方法
ES424612A1 (es) Un aparato optico de punteria.
EP0704737A3 (en) Optical system for printers and display systems
EP0111660A3 (en) Photometric printing apparatus
DE69212612D1 (de) Plattenklemmsystem für eine Vervielfältigungsmaschine
GB1382148A (en) Projection exposure systems and a method of positioning therein
GB1411793A (en) Scanning electron microscope
GB1462388A (en) Apparatus for printing on two surfaces of a radiation-sensitive material
GB1380074A (en) Optical alignment apparatus for projection printing system
GB1300156A (en) Optical imaging system
IE32522B1 (en) Improvements relating to photocomposing machines
US2500051A (en) Optical projection system for inspecting alignment of typewriter type
GB1207515A (en) Improvements relating to the optical alignment of patterns
ES452182A1 (es) Perfeccionamientos introducidos en una camara de television.
GB1510007A (en) Projection of images
GB2177519A (en) Apparatus for mounting an image-carrying substrate on a mounting sheet with the image at a desired orientation
NL8303470A (nl) Belichtingsinrichting.
US2282656A (en) Image reverser for cameras
GB1203748A (en) Improvement in or relating to an apparatus for projecting written characters
JPS52113750A (en) Scanning optical system having beam detecting optics for information
GB1473301A (en) Manufacture of multi-layer structures
GB1210055A (en) Improvements in and relating to photographic exposure arrangements
GB1360619A (en) Apparatus for testing beams of light
GB1265133A (enExample)

Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee