JPS509187B1 - - Google Patents
Info
- Publication number
- JPS509187B1 JPS509187B1 JP45111287A JP11128770A JPS509187B1 JP S509187 B1 JPS509187 B1 JP S509187B1 JP 45111287 A JP45111287 A JP 45111287A JP 11128770 A JP11128770 A JP 11128770A JP S509187 B1 JPS509187 B1 JP S509187B1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Projection-Type Copiers In General (AREA)
- Mounting And Adjusting Of Optical Elements (AREA)
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP45111287A JPS509187B1 (enExample) | 1970-12-15 | 1970-12-15 | |
| DE19712161746 DE2161746A1 (de) | 1970-12-15 | 1971-12-13 | Optische Justiervorrichtung |
| GB5807671A GB1380074A (en) | 1970-12-15 | 1971-12-14 | Optical alignment apparatus for projection printing system |
| FR7144952A FR2118625A5 (enExample) | 1970-12-15 | 1971-12-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP45111287A JPS509187B1 (enExample) | 1970-12-15 | 1970-12-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS509187B1 true JPS509187B1 (enExample) | 1975-04-10 |
Family
ID=14557388
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP45111287A Pending JPS509187B1 (enExample) | 1970-12-15 | 1970-12-15 |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JPS509187B1 (enExample) |
| DE (1) | DE2161746A1 (enExample) |
| FR (1) | FR2118625A5 (enExample) |
| GB (1) | GB1380074A (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115480353B (zh) * | 2022-09-16 | 2025-06-03 | 业成光电（深圳）有限公司 | 光学对位方法及光学对位装置 |
-
1970
- 1970-12-15 JP JP45111287A patent/JPS509187B1/ja active Pending
-
1971
- 1971-12-13 DE DE19712161746 patent/DE2161746A1/de not_active Withdrawn
- 1971-12-14 GB GB5807671A patent/GB1380074A/en not_active Expired
- 1971-12-14 FR FR7144952A patent/FR2118625A5/fr not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| GB1380074A (en) | 1975-01-08 |
| FR2118625A5 (enExample) | 1972-07-28 |
| DE2161746A1 (de) | 1972-07-06 |