GB1379872A - Apparatus for the doping of semiconductor discs - Google Patents
Apparatus for the doping of semiconductor discsInfo
- Publication number
- GB1379872A GB1379872A GB796673A GB796673A GB1379872A GB 1379872 A GB1379872 A GB 1379872A GB 796673 A GB796673 A GB 796673A GB 796673 A GB796673 A GB 796673A GB 1379872 A GB1379872 A GB 1379872A
- Authority
- GB
- United Kingdom
- Prior art keywords
- diffusion
- discs
- doping
- tube
- conductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
- C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
- C30B31/10—Reaction chambers; Selection of materials therefor
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19722235342 DE2235342A1 (de) | 1972-07-19 | 1972-07-19 | Diffusionsrohr zur dotierung von halbleiterscheiben |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1379872A true GB1379872A (en) | 1975-01-08 |
Family
ID=5851027
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB796673A Expired GB1379872A (en) | 1972-07-19 | 1973-02-19 | Apparatus for the doping of semiconductor discs |
Country Status (6)
Country | Link |
---|---|
JP (1) | JPS4960175A (zh) |
DE (1) | DE2235342A1 (zh) |
FR (1) | FR2192872A1 (zh) |
GB (1) | GB1379872A (zh) |
IT (1) | IT991242B (zh) |
NL (1) | NL7304675A (zh) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1502754A (en) * | 1975-12-22 | 1978-03-01 | Siemens Ag | Heat-treatment of semi-conductor wafers |
CN102797040B (zh) * | 2012-08-22 | 2015-08-12 | 中国科学院电工研究所 | 一种硼(b)扩散掺杂的方法 |
-
1972
- 1972-07-19 DE DE19722235342 patent/DE2235342A1/de active Pending
-
1973
- 1973-02-19 GB GB796673A patent/GB1379872A/en not_active Expired
- 1973-04-04 NL NL7304675A patent/NL7304675A/xx unknown
- 1973-07-13 FR FR7325824A patent/FR2192872A1/fr not_active Withdrawn
- 1973-07-18 IT IT2670473A patent/IT991242B/it active
- 1973-07-19 JP JP8261273A patent/JPS4960175A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
JPS4960175A (zh) | 1974-06-11 |
IT991242B (it) | 1975-07-30 |
DE2235342A1 (de) | 1974-01-31 |
NL7304675A (zh) | 1974-01-22 |
FR2192872A1 (zh) | 1974-02-15 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PS | Patent sealed | ||
PCNP | Patent ceased through non-payment of renewal fee |