FR2192872A1 - - Google Patents

Info

Publication number
FR2192872A1
FR2192872A1 FR7325824A FR7325824A FR2192872A1 FR 2192872 A1 FR2192872 A1 FR 2192872A1 FR 7325824 A FR7325824 A FR 7325824A FR 7325824 A FR7325824 A FR 7325824A FR 2192872 A1 FR2192872 A1 FR 2192872A1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
FR7325824A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Publication of FR2192872A1 publication Critical patent/FR2192872A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
    • C30B31/10—Reaction chambers; Selection of materials therefor

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
FR7325824A 1972-07-19 1973-07-13 Withdrawn FR2192872A1 (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19722235342 DE2235342A1 (de) 1972-07-19 1972-07-19 Diffusionsrohr zur dotierung von halbleiterscheiben

Publications (1)

Publication Number Publication Date
FR2192872A1 true FR2192872A1 (zh) 1974-02-15

Family

ID=5851027

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7325824A Withdrawn FR2192872A1 (zh) 1972-07-19 1973-07-13

Country Status (6)

Country Link
JP (1) JPS4960175A (zh)
DE (1) DE2235342A1 (zh)
FR (1) FR2192872A1 (zh)
GB (1) GB1379872A (zh)
IT (1) IT991242B (zh)
NL (1) NL7304675A (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2336796A1 (fr) * 1975-12-22 1977-07-22 Siemens Ag Procede pour le traitement thermique de disques semi-conducteurs

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102797040B (zh) * 2012-08-22 2015-08-12 中国科学院电工研究所 一种硼(b)扩散掺杂的方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2336796A1 (fr) * 1975-12-22 1977-07-22 Siemens Ag Procede pour le traitement thermique de disques semi-conducteurs

Also Published As

Publication number Publication date
JPS4960175A (zh) 1974-06-11
NL7304675A (zh) 1974-01-22
DE2235342A1 (de) 1974-01-31
IT991242B (it) 1975-07-30
GB1379872A (en) 1975-01-08

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Legal Events

Date Code Title Description
ST Notification of lapse