GB1379872A - Apparatus for the doping of semiconductor discs - Google Patents

Apparatus for the doping of semiconductor discs

Info

Publication number
GB1379872A
GB1379872A GB796673A GB796673A GB1379872A GB 1379872 A GB1379872 A GB 1379872A GB 796673 A GB796673 A GB 796673A GB 796673 A GB796673 A GB 796673A GB 1379872 A GB1379872 A GB 1379872A
Authority
GB
United Kingdom
Prior art keywords
diffusion
discs
doping
tube
conductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB796673A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens Corp
Original Assignee
Siemens Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Corp filed Critical Siemens Corp
Publication of GB1379872A publication Critical patent/GB1379872A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
    • C30B31/10—Reaction chambers; Selection of materials therefor

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
GB796673A 1972-07-19 1973-02-19 Apparatus for the doping of semiconductor discs Expired GB1379872A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19722235342 DE2235342A1 (de) 1972-07-19 1972-07-19 Diffusionsrohr zur dotierung von halbleiterscheiben

Publications (1)

Publication Number Publication Date
GB1379872A true GB1379872A (en) 1975-01-08

Family

ID=5851027

Family Applications (1)

Application Number Title Priority Date Filing Date
GB796673A Expired GB1379872A (en) 1972-07-19 1973-02-19 Apparatus for the doping of semiconductor discs

Country Status (6)

Country Link
JP (1) JPS4960175A (cs)
DE (1) DE2235342A1 (cs)
FR (1) FR2192872A1 (cs)
GB (1) GB1379872A (cs)
IT (1) IT991242B (cs)
NL (1) NL7304675A (cs)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1502754A (en) * 1975-12-22 1978-03-01 Siemens Ag Heat-treatment of semi-conductor wafers
CN102797040B (zh) * 2012-08-22 2015-08-12 中国科学院电工研究所 一种硼(b)扩散掺杂的方法

Also Published As

Publication number Publication date
DE2235342A1 (de) 1974-01-31
FR2192872A1 (cs) 1974-02-15
IT991242B (it) 1975-07-30
JPS4960175A (cs) 1974-06-11
NL7304675A (cs) 1974-01-22

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Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee