GB1369749A - Crucible for vaporizing chemically active elements methods of manufacturing the same and ion sourve including said crucible - Google Patents
Crucible for vaporizing chemically active elements methods of manufacturing the same and ion sourve including said crucibleInfo
- Publication number
- GB1369749A GB1369749A GB3155072A GB3155072A GB1369749A GB 1369749 A GB1369749 A GB 1369749A GB 3155072 A GB3155072 A GB 3155072A GB 3155072 A GB3155072 A GB 3155072A GB 1369749 A GB1369749 A GB 1369749A
- Authority
- GB
- United Kingdom
- Prior art keywords
- crucible
- mandrel
- tungsten
- sourve
- vaporizing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000000034 method Methods 0.000 title 1
- 230000008016 vaporization Effects 0.000 title 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 abstract 4
- 229910052721 tungsten Inorganic materials 0.000 abstract 4
- 239000010937 tungsten Substances 0.000 abstract 4
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 abstract 2
- 229910052739 hydrogen Inorganic materials 0.000 abstract 2
- 239000001257 hydrogen Substances 0.000 abstract 2
- 239000010453 quartz Substances 0.000 abstract 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- NXHILIPIEUBEPD-UHFFFAOYSA-H tungsten hexafluoride Chemical compound F[W](F)(F)(F)(F)F NXHILIPIEUBEPD-UHFFFAOYSA-H 0.000 abstract 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 abstract 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 abstract 1
- 238000006243 chemical reaction Methods 0.000 abstract 1
- 229910052802 copper Inorganic materials 0.000 abstract 1
- 239000010949 copper Substances 0.000 abstract 1
- 238000000151 deposition Methods 0.000 abstract 1
- 238000010438 heat treatment Methods 0.000 abstract 1
- 238000003754 machining Methods 0.000 abstract 1
- 229910017604 nitric acid Inorganic materials 0.000 abstract 1
- 238000000197 pyrolysis Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J27/00—Ion beam tubes
- H01J27/02—Ion sources; Ion guns
- H01J27/08—Ion sources; Ion guns using arc discharge
- H01J27/10—Duoplasmatrons ; Duopigatrons
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/4998—Combined manufacture including applying or shaping of fluent material
- Y10T29/49982—Coating
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Combustion & Propulsion (AREA)
- Physical Vapour Deposition (AREA)
- Electron Sources, Ion Sources (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR7124682A FR2145012A5 (enrdf_load_stackoverflow) | 1971-07-06 | 1971-07-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1369749A true GB1369749A (en) | 1974-10-09 |
Family
ID=9079898
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB3155072A Expired GB1369749A (en) | 1971-07-06 | 1972-07-05 | Crucible for vaporizing chemically active elements methods of manufacturing the same and ion sourve including said crucible |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US3789253A (enrdf_load_stackoverflow) |
| DE (1) | DE2233275A1 (enrdf_load_stackoverflow) |
| FR (1) | FR2145012A5 (enrdf_load_stackoverflow) |
| GB (1) | GB1369749A (enrdf_load_stackoverflow) |
| NL (1) | NL7209307A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2146836A (en) * | 1983-08-12 | 1985-04-24 | Centre Nat Rech Scient | A source of ions with at least two ionization chambers, in particular for forming chemically reactive ion beams |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4719355A (en) * | 1986-04-10 | 1988-01-12 | Texas Instruments Incorporated | Ion source for an ion implanter |
| US4791273A (en) * | 1987-05-15 | 1988-12-13 | Varian Associates, Inc. | Vaporizer system for ion source |
| DE19835512C1 (de) * | 1998-08-06 | 1999-12-16 | Daimlerchrysler Aerospace Ag | Ionentriebwerk |
| JP3485104B2 (ja) * | 2001-04-24 | 2004-01-13 | 日新電機株式会社 | イオン源用オーブン |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR1585902A (enrdf_load_stackoverflow) * | 1968-04-09 | 1970-02-06 |
-
1971
- 1971-07-06 FR FR7124682A patent/FR2145012A5/fr not_active Expired
-
1972
- 1972-06-22 US US00265303A patent/US3789253A/en not_active Expired - Lifetime
- 1972-07-03 NL NL7209307A patent/NL7209307A/xx unknown
- 1972-07-05 GB GB3155072A patent/GB1369749A/en not_active Expired
- 1972-07-06 DE DE2233275A patent/DE2233275A1/de active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2146836A (en) * | 1983-08-12 | 1985-04-24 | Centre Nat Rech Scient | A source of ions with at least two ionization chambers, in particular for forming chemically reactive ion beams |
Also Published As
| Publication number | Publication date |
|---|---|
| US3789253A (en) | 1974-01-29 |
| DE2233275A1 (de) | 1973-01-18 |
| FR2145012A5 (enrdf_load_stackoverflow) | 1973-02-16 |
| NL7209307A (enrdf_load_stackoverflow) | 1973-01-09 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Winter | Exchange reactions of oxides. Part IX | |
| GB1505193A (en) | Fluorescent lamps with grooves and method and apparatus for manufacturing same | |
| GB1332398A (en) | Multi-converter thermionic energy module | |
| GB1369749A (en) | Crucible for vaporizing chemically active elements methods of manufacturing the same and ion sourve including said crucible | |
| GB1484860A (en) | Manufacture of boric acid | |
| JPS5711810A (en) | Preparation of metal carbonitride | |
| GB1314743A (en) | Cathode component for solid state cell | |
| GB1442617A (en) | Method of producing metal monocarbides monitrides and carboni trides | |
| GB1371187A (en) | Process for the production of xylenol | |
| AU463596B2 (en) | Hydrogen gas manufacturing process | |
| GB1470280A (en) | Superconducting articles of manufacture and method of producing same | |
| GB1408883A (en) | Production of tio2-layers by vapour deposition | |
| ES375086A1 (es) | Un procedimiento de preparacion de un nuevo gel transparen-te. | |
| GB1532693A (en) | Glass-processing elements | |
| JPS5413408A (en) | Manufacture of high purity metallic chromium | |
| GB1150753A (en) | Method of Metallizing Bodies made from Ceramics or Crystallized Glass and method of producing a Gas Tight Seal | |
| Gehman et al. | The mechanism of racemization of the tris (ethylenediamine) cobalt (III) cation | |
| GB1482016A (en) | Epitaxial deposition of semiconductor material | |
| GB1409340A (en) | Superconducting niobium-gallium alloy | |
| GB1104178A (en) | Tungsten bronze films | |
| JPS5223518A (en) | Steel of extremeiy low yield point with excellent workability and non- aging property and production | |
| GB1435243A (en) | Ketimine derivatives and process for their production | |
| JPS5212330A (en) | Process for producing acrylic fibers for carbon fibers | |
| GB1148188A (en) | Process for obtaining thin layers of a product by evaporation in vacuo | |
| GB1246077A (en) | An improvement in or modification of a process for evaporating a metal in vacuo at high temperature, allowing of avoiding metal projections |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PS | Patent sealed [section 19, patents act 1949] | ||
| PCNP | Patent ceased through non-payment of renewal fee |