GB1363815A - Semiconductor device and method of producing same - Google Patents

Semiconductor device and method of producing same

Info

Publication number
GB1363815A
GB1363815A GB5102172A GB5102172A GB1363815A GB 1363815 A GB1363815 A GB 1363815A GB 5102172 A GB5102172 A GB 5102172A GB 5102172 A GB5102172 A GB 5102172A GB 1363815 A GB1363815 A GB 1363815A
Authority
GB
United Kingdom
Prior art keywords
layer
metallization
insulating layer
windows
top surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB5102172A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tektronix Inc
Original Assignee
Tektronix Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tektronix Inc filed Critical Tektronix Inc
Publication of GB1363815A publication Critical patent/GB1363815A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/40—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Semiconductor Integrated Circuits (AREA)
GB5102172A 1971-12-06 1972-11-06 Semiconductor device and method of producing same Expired GB1363815A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US20480971A 1971-12-06 1971-12-06

Publications (1)

Publication Number Publication Date
GB1363815A true GB1363815A (en) 1974-08-21

Family

ID=22759521

Family Applications (1)

Application Number Title Priority Date Filing Date
GB5102172A Expired GB1363815A (en) 1971-12-06 1972-11-06 Semiconductor device and method of producing same

Country Status (6)

Country Link
JP (1) JPS555699B2 (https=)
CA (1) CA984061A (https=)
DE (1) DE2259267A1 (https=)
FR (1) FR2162657B1 (https=)
GB (1) GB1363815A (https=)
NL (1) NL7216472A (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4960870A (https=) * 1972-10-16 1974-06-13
FR2284981A1 (fr) * 1974-09-10 1976-04-09 Radiotechnique Compelec Procede d'obtention d'un circuit integre semiconducteur
US4045594A (en) * 1975-12-31 1977-08-30 Ibm Corporation Planar insulation of conductive patterns by chemical vapor deposition and sputtering
JPS5425178A (en) * 1977-07-27 1979-02-24 Fujitsu Ltd Manufacture for semiconductor device

Also Published As

Publication number Publication date
FR2162657A1 (https=) 1973-07-20
NL7216472A (https=) 1973-06-08
CA984061A (en) 1976-02-17
FR2162657B1 (https=) 1977-07-22
JPS555699B2 (https=) 1980-02-08
DE2259267A1 (de) 1973-06-28
JPS4866381A (https=) 1973-09-11

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee