JPS4866381A - - Google Patents
Info
- Publication number
- JPS4866381A JPS4866381A JP47120274A JP12027472A JPS4866381A JP S4866381 A JPS4866381 A JP S4866381A JP 47120274 A JP47120274 A JP 47120274A JP 12027472 A JP12027472 A JP 12027472A JP S4866381 A JPS4866381 A JP S4866381A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W20/00—Interconnections in chips, wafers or substrates
- H10W20/40—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Semiconductor Integrated Circuits (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US20480971A | 1971-12-06 | 1971-12-06 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4866381A true JPS4866381A (https=) | 1973-09-11 |
| JPS555699B2 JPS555699B2 (https=) | 1980-02-08 |
Family
ID=22759521
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12027472A Expired JPS555699B2 (https=) | 1971-12-06 | 1972-11-30 |
Country Status (6)
| Country | Link |
|---|---|
| JP (1) | JPS555699B2 (https=) |
| CA (1) | CA984061A (https=) |
| DE (1) | DE2259267A1 (https=) |
| FR (1) | FR2162657B1 (https=) |
| GB (1) | GB1363815A (https=) |
| NL (1) | NL7216472A (https=) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4960870A (https=) * | 1972-10-16 | 1974-06-13 | ||
| FR2284981A1 (fr) * | 1974-09-10 | 1976-04-09 | Radiotechnique Compelec | Procede d'obtention d'un circuit integre semiconducteur |
| US4045594A (en) * | 1975-12-31 | 1977-08-30 | Ibm Corporation | Planar insulation of conductive patterns by chemical vapor deposition and sputtering |
| JPS5425178A (en) * | 1977-07-27 | 1979-02-24 | Fujitsu Ltd | Manufacture for semiconductor device |
-
1972
- 1972-11-06 GB GB5102172A patent/GB1363815A/en not_active Expired
- 1972-11-07 CA CA155,827A patent/CA984061A/en not_active Expired
- 1972-11-30 JP JP12027472A patent/JPS555699B2/ja not_active Expired
- 1972-12-04 DE DE2259267A patent/DE2259267A1/de active Pending
- 1972-12-05 FR FR7243921A patent/FR2162657B1/fr not_active Expired
- 1972-12-05 NL NL7216472A patent/NL7216472A/xx unknown
Also Published As
| Publication number | Publication date |
|---|---|
| FR2162657A1 (https=) | 1973-07-20 |
| NL7216472A (https=) | 1973-06-08 |
| CA984061A (en) | 1976-02-17 |
| FR2162657B1 (https=) | 1977-07-22 |
| JPS555699B2 (https=) | 1980-02-08 |
| DE2259267A1 (de) | 1973-06-28 |
| GB1363815A (en) | 1974-08-21 |