CA984061A - Multilayer metal integrated circuit - Google Patents

Multilayer metal integrated circuit

Info

Publication number
CA984061A
CA984061A CA155,827A CA155827A CA984061A CA 984061 A CA984061 A CA 984061A CA 155827 A CA155827 A CA 155827A CA 984061 A CA984061 A CA 984061A
Authority
CA
Canada
Prior art keywords
integrated circuit
multilayer metal
metal integrated
multilayer
circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA155,827A
Other languages
English (en)
Other versions
CA155827S (en
Inventor
James M. Pickett
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tektronix Inc
Original Assignee
Tektronix Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tektronix Inc filed Critical Tektronix Inc
Application granted granted Critical
Publication of CA984061A publication Critical patent/CA984061A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/40—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes
CA155,827A 1971-12-06 1972-11-07 Multilayer metal integrated circuit Expired CA984061A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US20480971A 1971-12-06 1971-12-06

Publications (1)

Publication Number Publication Date
CA984061A true CA984061A (en) 1976-02-17

Family

ID=22759521

Family Applications (1)

Application Number Title Priority Date Filing Date
CA155,827A Expired CA984061A (en) 1971-12-06 1972-11-07 Multilayer metal integrated circuit

Country Status (6)

Country Link
JP (1) JPS555699B2 (https=)
CA (1) CA984061A (https=)
DE (1) DE2259267A1 (https=)
FR (1) FR2162657B1 (https=)
GB (1) GB1363815A (https=)
NL (1) NL7216472A (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4960870A (https=) * 1972-10-16 1974-06-13
FR2284981A1 (fr) * 1974-09-10 1976-04-09 Radiotechnique Compelec Procede d'obtention d'un circuit integre semiconducteur
US4045594A (en) * 1975-12-31 1977-08-30 Ibm Corporation Planar insulation of conductive patterns by chemical vapor deposition and sputtering
JPS5425178A (en) * 1977-07-27 1979-02-24 Fujitsu Ltd Manufacture for semiconductor device

Also Published As

Publication number Publication date
FR2162657A1 (https=) 1973-07-20
NL7216472A (https=) 1973-06-08
FR2162657B1 (https=) 1977-07-22
JPS555699B2 (https=) 1980-02-08
DE2259267A1 (de) 1973-06-28
GB1363815A (en) 1974-08-21
JPS4866381A (https=) 1973-09-11

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