GB1363815A - Semiconductor device and method of producing same - Google Patents
Semiconductor device and method of producing sameInfo
- Publication number
- GB1363815A GB1363815A GB5102172A GB5102172A GB1363815A GB 1363815 A GB1363815 A GB 1363815A GB 5102172 A GB5102172 A GB 5102172A GB 5102172 A GB5102172 A GB 5102172A GB 1363815 A GB1363815 A GB 1363815A
- Authority
- GB
- United Kingdom
- Prior art keywords
- layer
- metallization
- insulating layer
- windows
- top surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000000034 method Methods 0.000 title abstract 2
- 239000004065 semiconductor Substances 0.000 title abstract 2
- 238000001465 metallisation Methods 0.000 abstract 4
- 229910004298 SiO 2 Inorganic materials 0.000 abstract 1
- 230000002939 deleterious effect Effects 0.000 abstract 1
- 238000000151 deposition Methods 0.000 abstract 1
- 238000005530 etching Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Semiconductor Integrated Circuits (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US20480971A | 1971-12-06 | 1971-12-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1363815A true GB1363815A (en) | 1974-08-21 |
Family
ID=22759521
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB5102172A Expired GB1363815A (en) | 1971-12-06 | 1972-11-06 | Semiconductor device and method of producing same |
Country Status (6)
| Country | Link |
|---|---|
| JP (1) | JPS555699B2 (enrdf_load_stackoverflow) |
| CA (1) | CA984061A (enrdf_load_stackoverflow) |
| DE (1) | DE2259267A1 (enrdf_load_stackoverflow) |
| FR (1) | FR2162657B1 (enrdf_load_stackoverflow) |
| GB (1) | GB1363815A (enrdf_load_stackoverflow) |
| NL (1) | NL7216472A (enrdf_load_stackoverflow) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4960870A (enrdf_load_stackoverflow) * | 1972-10-16 | 1974-06-13 | ||
| FR2284981A1 (fr) * | 1974-09-10 | 1976-04-09 | Radiotechnique Compelec | Procede d'obtention d'un circuit integre semiconducteur |
| US4045594A (en) * | 1975-12-31 | 1977-08-30 | Ibm Corporation | Planar insulation of conductive patterns by chemical vapor deposition and sputtering |
| JPS5425178A (en) * | 1977-07-27 | 1979-02-24 | Fujitsu Ltd | Manufacture for semiconductor device |
-
1972
- 1972-11-06 GB GB5102172A patent/GB1363815A/en not_active Expired
- 1972-11-07 CA CA155,827A patent/CA984061A/en not_active Expired
- 1972-11-30 JP JP12027472A patent/JPS555699B2/ja not_active Expired
- 1972-12-04 DE DE19722259267 patent/DE2259267A1/de active Pending
- 1972-12-05 FR FR7243921A patent/FR2162657B1/fr not_active Expired
- 1972-12-05 NL NL7216472A patent/NL7216472A/xx unknown
Also Published As
| Publication number | Publication date |
|---|---|
| DE2259267A1 (de) | 1973-06-28 |
| NL7216472A (enrdf_load_stackoverflow) | 1973-06-08 |
| JPS4866381A (enrdf_load_stackoverflow) | 1973-09-11 |
| FR2162657B1 (enrdf_load_stackoverflow) | 1977-07-22 |
| FR2162657A1 (enrdf_load_stackoverflow) | 1973-07-20 |
| JPS555699B2 (enrdf_load_stackoverflow) | 1980-02-08 |
| CA984061A (en) | 1976-02-17 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US3462650A (en) | Electrical circuit manufacture | |
| US3564358A (en) | Integrated circuit structure containing multiple sandwich layers of monocrystalline semiconductor and insulator material | |
| GB1439209A (en) | Integrated circuit devices | |
| GB1076440A (en) | Isolation of semiconductor devices | |
| US3722079A (en) | Process for forming buried layers to reduce collector resistance in top contact transistors | |
| US3791024A (en) | Fabrication of monolithic integrated circuits | |
| US3357871A (en) | Method for fabricating integrated circuits | |
| JPS5334484A (en) | Forming method for multi layer wiring | |
| GB1363815A (en) | Semiconductor device and method of producing same | |
| US3341743A (en) | Integrated circuitry having discrete regions of semiconductor material isolated by an insulating material | |
| US3370204A (en) | Composite insulator-semiconductor wafer | |
| DE3363387D1 (en) | Method of making an insulating layer between metallisation layers of integrated semiconductor circuits | |
| US3533160A (en) | Air-isolated integrated circuits | |
| GB1129891A (en) | Improvements in or relating to methods of manufacturing solid state circuits | |
| US3696274A (en) | Air isolated integrated circuit and method | |
| JPS5731155A (en) | Manufacture of semiconductor device | |
| JPS6441244A (en) | Manufacture of semiconductor device | |
| US3421205A (en) | Fabrication of structures for semiconductor integrated circuits | |
| JPS5789239A (en) | Semiconductor integrated circuit | |
| JPS57164560A (en) | Manufacture of semiconductor integrated circuit device | |
| JPS55113344A (en) | Electrode wiring and its manufacture | |
| JPS57160156A (en) | Semiconductor device | |
| JPS57167656A (en) | Manufacture of semiconductor device | |
| JPS6484735A (en) | Manufacture of semiconductor device | |
| JPS5740968A (en) | Semiconductor device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PS | Patent sealed | ||
| PCNP | Patent ceased through non-payment of renewal fee |