CA984061A - Multilayer metal integrated circuit - Google Patents

Multilayer metal integrated circuit

Info

Publication number
CA984061A
CA984061A CA155,827A CA155827A CA984061A CA 984061 A CA984061 A CA 984061A CA 155827 A CA155827 A CA 155827A CA 984061 A CA984061 A CA 984061A
Authority
CA
Canada
Prior art keywords
integrated circuit
multilayer metal
metal integrated
multilayer
circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA155,827A
Other languages
English (en)
Other versions
CA155827S (en
Inventor
James M. Pickett
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tektronix Inc
Original Assignee
Tektronix Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tektronix Inc filed Critical Tektronix Inc
Application granted granted Critical
Publication of CA984061A publication Critical patent/CA984061A/en
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/52Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
    • H01L23/522Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Semiconductor Integrated Circuits (AREA)
CA155,827A 1971-12-06 1972-11-07 Multilayer metal integrated circuit Expired CA984061A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US20480971A 1971-12-06 1971-12-06

Publications (1)

Publication Number Publication Date
CA984061A true CA984061A (en) 1976-02-17

Family

ID=22759521

Family Applications (1)

Application Number Title Priority Date Filing Date
CA155,827A Expired CA984061A (en) 1971-12-06 1972-11-07 Multilayer metal integrated circuit

Country Status (6)

Country Link
JP (1) JPS555699B2 (enrdf_load_stackoverflow)
CA (1) CA984061A (enrdf_load_stackoverflow)
DE (1) DE2259267A1 (enrdf_load_stackoverflow)
FR (1) FR2162657B1 (enrdf_load_stackoverflow)
GB (1) GB1363815A (enrdf_load_stackoverflow)
NL (1) NL7216472A (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4960870A (enrdf_load_stackoverflow) * 1972-10-16 1974-06-13
FR2284981A1 (fr) * 1974-09-10 1976-04-09 Radiotechnique Compelec Procede d'obtention d'un circuit integre semiconducteur
US4045594A (en) * 1975-12-31 1977-08-30 Ibm Corporation Planar insulation of conductive patterns by chemical vapor deposition and sputtering
JPS5425178A (en) * 1977-07-27 1979-02-24 Fujitsu Ltd Manufacture for semiconductor device

Also Published As

Publication number Publication date
JPS4866381A (enrdf_load_stackoverflow) 1973-09-11
GB1363815A (en) 1974-08-21
DE2259267A1 (de) 1973-06-28
JPS555699B2 (enrdf_load_stackoverflow) 1980-02-08
FR2162657B1 (enrdf_load_stackoverflow) 1977-07-22
FR2162657A1 (enrdf_load_stackoverflow) 1973-07-20
NL7216472A (enrdf_load_stackoverflow) 1973-06-08

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