GB1362340A - Method of measuring small objects - Google Patents

Method of measuring small objects

Info

Publication number
GB1362340A
GB1362340A GB3302072A GB3302072A GB1362340A GB 1362340 A GB1362340 A GB 1362340A GB 3302072 A GB3302072 A GB 3302072A GB 3302072 A GB3302072 A GB 3302072A GB 1362340 A GB1362340 A GB 1362340A
Authority
GB
United Kingdom
Prior art keywords
diffraction patterns
beams
reference object
orthogonally
beam splitter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB3302072A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BBC BROWN BOVERI and CIE
BBC Brown Boveri AG Switzerland
Original Assignee
BBC BROWN BOVERI and CIE
BBC Brown Boveri AG Switzerland
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BBC BROWN BOVERI and CIE, BBC Brown Boveri AG Switzerland filed Critical BBC BROWN BOVERI and CIE
Publication of GB1362340A publication Critical patent/GB1362340A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/08—Measuring arrangements characterised by the use of optical techniques for measuring diameters
    • G01B11/10—Measuring arrangements characterised by the use of optical techniques for measuring diameters of objects while moving
    • G01B11/105—Measuring arrangements characterised by the use of optical techniques for measuring diameters of objects while moving using photoelectric detection means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
GB3302072A 1971-07-17 1972-07-14 Method of measuring small objects Expired GB1362340A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH1055571A CH534342A (de) 1971-07-17 1971-07-17 Verfahren zur Ausmessung kleiner Objekte

Publications (1)

Publication Number Publication Date
GB1362340A true GB1362340A (en) 1974-08-07

Family

ID=4364456

Family Applications (1)

Application Number Title Priority Date Filing Date
GB3302072A Expired GB1362340A (en) 1971-07-17 1972-07-14 Method of measuring small objects

Country Status (7)

Country Link
US (1) US3806251A (OSRAM)
JP (1) JPS5435100B1 (OSRAM)
AT (1) AT360767B (OSRAM)
CH (1) CH534342A (OSRAM)
FR (1) FR2146752A5 (OSRAM)
GB (1) GB1362340A (OSRAM)
NL (1) NL7209067A (OSRAM)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH611017A5 (OSRAM) * 1976-05-05 1979-05-15 Zumbach Electronic Ag
FR2453390A1 (fr) * 1979-04-06 1980-10-31 Valti Sa Fabric Tubes Roulemen Dispositif de mesure optique sans contact du diametre exterieur d'objets de section circulaire, notamment de tubes
JPS56124003A (en) * 1980-03-06 1981-09-29 Toshiba Corp Measuring device for pattern
US6055329A (en) * 1994-06-09 2000-04-25 Sherikon, Inc. High speed opto-electronic gage and method for gaging
US5661589A (en) * 1995-02-24 1997-08-26 J. A. Woollam Co. Inc. Bilateral slit assembly, and method of use
DE19604440A1 (de) * 1996-02-07 1997-08-14 Patent Treuhand Ges Fuer Elektrische Gluehlampen Mbh Verfahren und Vorrichtung zur Beurteilung eines Ziehsteins
WO2001001069A1 (de) * 1999-06-28 2001-01-04 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren und vorrichtung zur messung der schichtdicke
US6885463B2 (en) * 1999-10-28 2005-04-26 Oes, Inc. Sensor device that provides part quality and profile information
CN109945783B (zh) * 2019-03-13 2020-11-17 北京交通大学 基于夫琅禾费衍射的微距测量方法
US12259226B1 (en) * 2024-04-30 2025-03-25 King Saud University Method of measuring thickness of thin films using diffraction of polarized light through a thin film

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1229739B (de) * 1964-02-21 1966-12-01 Bundesrep Deutschland Vorrichtung zur kontinuierlichen Bestimmung des Durchmessers eines duennen Drahtes
US3447874A (en) * 1965-12-20 1969-06-03 Frank G Back Apparatus for testing lenses and method
US3659950A (en) * 1969-07-14 1972-05-02 Iris Corp Laser apparatus for detecting the size and form of filamentary material by measuring diffracted light

Also Published As

Publication number Publication date
US3806251A (en) 1974-04-23
DE2138999B1 (de) 1973-01-04
DE2138999A1 (OSRAM) 1973-01-04
ATA105272A (de) 1980-06-15
AT360767B (de) 1981-01-26
JPS5435100B1 (OSRAM) 1979-10-31
CH534342A (de) 1973-02-28
NL7209067A (OSRAM) 1973-01-19
FR2146752A5 (OSRAM) 1973-03-02

Similar Documents

Publication Publication Date Title
US3891321A (en) Optical method and apparatus for measuring the relative displacement of a diffraction grid
US3822942A (en) Method of testing a length, angle, path difference or speed by detecting interference and apparatus therefor
US4030831A (en) Phase detector for optical figure sensing
US3764218A (en) Light beam edge detection
US4480916A (en) Phase-modulated polarizing interferometer
US4176951A (en) Rotating birefringent ellipsometer and its application to photoelasticimetry
US4076423A (en) Optical coherence measuring device
GB1362340A (en) Method of measuring small objects
CA1240174A (en) Method of and device for real time measurement of the state of polarization of a quasi-monochromatic light beam
JP2015049062A (ja) 欠陥検査装置及び欠陥検査方法
US4732481A (en) Polarization interferometer
JPH0339605A (ja) 光学式表面形状測定装置
US4310247A (en) Method and apparatus for analyzing the state of polarization of radiation
US3230820A (en) Polarimeter
US3602597A (en) Differential circular dichroism measuring apparatus
US3572938A (en) Polarimeter
US5926295A (en) Holographic process and device using incoherent light
GB1287025A (en) A photometer arrangement for observation instruments
US3717404A (en) Apparatus for determining the position of an object in an arbitrary cross-section of a beam of radiation
GB1511354A (en) Distance measuring apparatus
Harvey et al. Stationary Fourier transform spectrometer for use as a teaching tool
GB1210273A (en) Optical dichroism measuring apparatus & method
GB1308957A (en) Methods and apparatus for determining the distance of an object
GB1316677A (en) Method and apparatus for the production of holograms
SU940017A1 (ru) Пол ризационный интерферометр

Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee