GB1350440A - Apparatus for measuring surface roughness - Google Patents

Apparatus for measuring surface roughness

Info

Publication number
GB1350440A
GB1350440A GB2485171A GB2485171A GB1350440A GB 1350440 A GB1350440 A GB 1350440A GB 2485171 A GB2485171 A GB 2485171A GB 2485171 A GB2485171 A GB 2485171A GB 1350440 A GB1350440 A GB 1350440A
Authority
GB
United Kingdom
Prior art keywords
beams
sub
another
disclosed
superimposed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB2485171A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Philips Electronics UK Ltd
Original Assignee
Philips Electronic and Associated Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Electronic and Associated Industries Ltd filed Critical Philips Electronic and Associated Industries Ltd
Publication of GB1350440A publication Critical patent/GB1350440A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02097—Self-interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Microscoopes, Condenser (AREA)
GB2485171A 1970-03-25 1971-04-19 Apparatus for measuring surface roughness Expired GB1350440A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7004247A NL7004247A (enrdf_load_stackoverflow) 1970-03-25 1970-03-25

Publications (1)

Publication Number Publication Date
GB1350440A true GB1350440A (en) 1974-04-18

Family

ID=19809670

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2485171A Expired GB1350440A (en) 1970-03-25 1971-04-19 Apparatus for measuring surface roughness

Country Status (4)

Country Link
JP (1) JPS532076B1 (enrdf_load_stackoverflow)
FR (1) FR2088257B2 (enrdf_load_stackoverflow)
GB (1) GB1350440A (enrdf_load_stackoverflow)
NL (1) NL7004247A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0094835B1 (en) * 1982-05-17 1988-03-30 National Research Development Corporation Apparatus for investigation of a surface
GB2250810A (en) * 1990-10-24 1992-06-17 Kevin Maurice Buckley Gravitational interferometry observatory
WO2005001445A3 (en) * 2001-12-18 2005-12-15 Massachusetts Inst Technology Systems and methods for phase measurements
US9528817B2 (en) 2001-12-18 2016-12-27 Massachusetts Institute Of Technology Systems and methods for phase measurements

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5416883B2 (ja) * 2003-06-19 2014-02-12 マサチユセツツ・インスチチユート・オブ・テクノロジイ 位相測定用システムと方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0094835B1 (en) * 1982-05-17 1988-03-30 National Research Development Corporation Apparatus for investigation of a surface
GB2250810A (en) * 1990-10-24 1992-06-17 Kevin Maurice Buckley Gravitational interferometry observatory
WO2005001445A3 (en) * 2001-12-18 2005-12-15 Massachusetts Inst Technology Systems and methods for phase measurements
US9528817B2 (en) 2001-12-18 2016-12-27 Massachusetts Institute Of Technology Systems and methods for phase measurements

Also Published As

Publication number Publication date
DE2112229A1 (de) 1971-10-14
FR2088257A2 (enrdf_load_stackoverflow) 1972-01-07
JPS532076B1 (enrdf_load_stackoverflow) 1978-01-25
DE2112229B2 (de) 1977-05-26
NL7004247A (enrdf_load_stackoverflow) 1971-09-28
FR2088257B2 (enrdf_load_stackoverflow) 1973-06-08

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Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee