GB1347178A - Production of semiconductor arrangements - Google Patents

Production of semiconductor arrangements

Info

Publication number
GB1347178A
GB1347178A GB3816872A GB3816872A GB1347178A GB 1347178 A GB1347178 A GB 1347178A GB 3816872 A GB3816872 A GB 3816872A GB 3816872 A GB3816872 A GB 3816872A GB 1347178 A GB1347178 A GB 1347178A
Authority
GB
United Kingdom
Prior art keywords
layer
aug
sio
volume
production
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB3816872A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens Corp
Original Assignee
Siemens Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Corp filed Critical Siemens Corp
Publication of GB1347178A publication Critical patent/GB1347178A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/60—Formation of materials, e.g. in the shape of layers or pillars of insulating materials
    • H10P14/63—Formation of materials, e.g. in the shape of layers or pillars of insulating materials characterised by the formation processes
    • H10P14/6326—Deposition processes
    • H10P14/6328—Deposition from the gas or vapour phase
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00—Encapsulations, e.g. protective coatings
    • H10W74/10—Encapsulations, e.g. protective coatings characterised by their shape or disposition
    • H10W74/131—Encapsulations, e.g. protective coatings characterised by their shape or disposition the semiconductor body being only partially enclosed
    • H10W74/147—Encapsulations, e.g. protective coatings characterised by their shape or disposition the semiconductor body being only partially enclosed the encapsulations being multilayered

Landscapes

  • Formation Of Insulating Films (AREA)
GB3816872A 1971-08-17 1972-08-16 Production of semiconductor arrangements Expired GB1347178A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2141182A DE2141182A1 (de) 1971-08-17 1971-08-17 Verfahren zur herstellung einer halbleiteranordnung

Publications (1)

Publication Number Publication Date
GB1347178A true GB1347178A (en) 1974-02-27

Family

ID=5816981

Family Applications (1)

Application Number Title Priority Date Filing Date
GB3816872A Expired GB1347178A (en) 1971-08-17 1972-08-16 Production of semiconductor arrangements

Country Status (7)

Country Link
JP (1) JPS4830378A (enExample)
CH (1) CH565450A5 (enExample)
DE (1) DE2141182A1 (enExample)
FR (1) FR2149485B1 (enExample)
GB (1) GB1347178A (enExample)
IT (1) IT963845B (enExample)
NL (1) NL7209209A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008013529B4 (de) * 2008-03-11 2016-12-15 Krones Aktiengesellschaft Verfahren und Vorrichtung zum Kontrollieren einer Innenraumbehandlung eines Behälters

Also Published As

Publication number Publication date
NL7209209A (enExample) 1973-02-20
JPS4830378A (enExample) 1973-04-21
FR2149485A1 (enExample) 1973-03-30
IT963845B (it) 1974-01-21
CH565450A5 (enExample) 1975-08-15
DE2141182A1 (de) 1973-02-22
FR2149485B1 (enExample) 1977-07-29

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee