GB1338208A - Double pass coaxial cylinder analyzer for charged particles - Google Patents

Double pass coaxial cylinder analyzer for charged particles

Info

Publication number
GB1338208A
GB1338208A GB3659672A GB3659672A GB1338208A GB 1338208 A GB1338208 A GB 1338208A GB 3659672 A GB3659672 A GB 3659672A GB 3659672 A GB3659672 A GB 3659672A GB 1338208 A GB1338208 A GB 1338208A
Authority
GB
United Kingdom
Prior art keywords
cylinders
electrons
plate
analyser
specimen
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB3659672A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Physical Electronics Inc
Original Assignee
Physical Electronics Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Physical Electronics Inc filed Critical Physical Electronics Inc
Publication of GB1338208A publication Critical patent/GB1338208A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/28—Static spectrometers
    • H01J49/282—Static spectrometers using electrostatic analysers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
    • H01J49/482—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter with cylindrical mirrors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
    • H01J49/484—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter with spherical mirrors

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Tubes For Measurement (AREA)
  • Measurement Of Radiation (AREA)
GB3659672A 1971-08-27 1972-08-04 Double pass coaxial cylinder analyzer for charged particles Expired GB1338208A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US17557571A 1971-08-27 1971-08-27

Publications (1)

Publication Number Publication Date
GB1338208A true GB1338208A (en) 1973-11-21

Family

ID=22640776

Family Applications (1)

Application Number Title Priority Date Filing Date
GB3659672A Expired GB1338208A (en) 1971-08-27 1972-08-04 Double pass coaxial cylinder analyzer for charged particles

Country Status (4)

Country Link
US (1) US3699331A (enrdf_load_stackoverflow)
JP (1) JPS5338948B2 (enrdf_load_stackoverflow)
FR (1) FR2150887B1 (enrdf_load_stackoverflow)
GB (1) GB1338208A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110618443A (zh) * 2019-08-26 2019-12-27 北京控制工程研究所 一种等离子体推力器稳态离子流场测量装置及测量方法

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1327572A (en) * 1971-03-23 1973-08-22 Ass Elect Ind Apparatus for use in charged particle spectroscopy
US3870882A (en) * 1973-05-23 1975-03-11 Gca Corp Esca x-ray source
JPS5831700B2 (ja) * 1975-06-06 1983-07-07 ニホンシンクウギジユツ カブシキガイシヤ イオンシツリヨウブンセキソウチ
US4048498A (en) * 1976-09-01 1977-09-13 Physical Electronics Industries, Inc. Scanning auger microprobe with variable axial aperture
JPS597736Y2 (ja) * 1977-02-25 1984-03-09 日本電子株式会社 電子分光装置
DE2851743C2 (de) * 1978-11-30 1980-08-28 Kernforschungsanlage Juelich Gmbh, 5170 Juelich ElektronenstoBspektrometer
US4224518A (en) * 1978-12-21 1980-09-23 Varian Associates, Inc. Multistage cylindrical mirror analyzer incorporating a coaxial electron gun
US4367406A (en) * 1981-01-13 1983-01-04 Trustees Of Boston University Cylindrical mirror electrostatic energy analyzer free of third-order angular aberrations
US5032724A (en) * 1990-08-09 1991-07-16 The Perkin-Elmer Corporation Multichannel charged-particle analyzer
US6184523B1 (en) * 1998-07-14 2001-02-06 Board Of Regents Of The University Of Nebraska High resolution charged particle-energy detecting, multiple sequential stage, compact, small diameter, retractable cylindrical mirror analyzer system, and method of use
JPWO2008114684A1 (ja) * 2007-03-16 2010-07-01 国立大学法人 奈良先端科学技術大学院大学 エネルギー分析器、２次元表示型エネルギー分析器および光電子顕微鏡
GB0720901D0 (en) * 2007-10-24 2007-12-05 Shimadzu Res Lab Europe Ltd Charged particle energy analysers
US8071942B2 (en) * 2009-03-20 2011-12-06 Physical Electronics USA, Inc. Sample holder apparatus to reduce energy of electrons in an analyzer system and method
WO2011009065A2 (en) * 2009-07-17 2011-01-20 Kla-Tencor Corporation Charged-particle energy analyzer
CN106568832A (zh) * 2016-10-31 2017-04-19 中国科学院国家空间科学中心 一种用于空间热等离子体能量和成分测量的传感器装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3582649A (en) * 1968-10-21 1971-06-01 Varian Associates Retarding field electron diffraction spectrometer having improved resolution
US3596091A (en) * 1969-05-19 1971-07-27 Varian Associates Induced electron emission spectrometer having a unipotential sample chamber
US3631238A (en) * 1969-11-17 1971-12-28 North American Rockwell Method of measuring electric potential on an object surface using auger electron spectroscopy

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110618443A (zh) * 2019-08-26 2019-12-27 北京控制工程研究所 一种等离子体推力器稳态离子流场测量装置及测量方法

Also Published As

Publication number Publication date
DE2241612B2 (de) 1976-01-15
JPS5338948B2 (enrdf_load_stackoverflow) 1978-10-18
US3699331A (en) 1972-10-17
JPS4832589A (enrdf_load_stackoverflow) 1973-04-28
FR2150887B1 (enrdf_load_stackoverflow) 1976-08-13
FR2150887A1 (enrdf_load_stackoverflow) 1973-04-13
DE2241612A1 (de) 1973-03-08

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee