JPS5338948B2 - - Google Patents

Info

Publication number
JPS5338948B2
JPS5338948B2 JP8607972A JP8607972A JPS5338948B2 JP S5338948 B2 JPS5338948 B2 JP S5338948B2 JP 8607972 A JP8607972 A JP 8607972A JP 8607972 A JP8607972 A JP 8607972A JP S5338948 B2 JPS5338948 B2 JP S5338948B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP8607972A
Other languages
Japanese (ja)
Other versions
JPS4832589A (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS4832589A publication Critical patent/JPS4832589A/ja
Publication of JPS5338948B2 publication Critical patent/JPS5338948B2/ja
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/28—Static spectrometers
    • H01J49/282—Static spectrometers using electrostatic analysers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
    • H01J49/482—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter with cylindrical mirrors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
    • H01J49/484—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter with spherical mirrors

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Tubes For Measurement (AREA)
  • Measurement Of Radiation (AREA)
JP8607972A 1971-08-27 1972-08-28 Expired JPS5338948B2 (enrdf_load_stackoverflow)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US17557571A 1971-08-27 1971-08-27

Publications (2)

Publication Number Publication Date
JPS4832589A JPS4832589A (enrdf_load_stackoverflow) 1973-04-28
JPS5338948B2 true JPS5338948B2 (enrdf_load_stackoverflow) 1978-10-18

Family

ID=22640776

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8607972A Expired JPS5338948B2 (enrdf_load_stackoverflow) 1971-08-27 1972-08-28

Country Status (4)

Country Link
US (1) US3699331A (enrdf_load_stackoverflow)
JP (1) JPS5338948B2 (enrdf_load_stackoverflow)
FR (1) FR2150887B1 (enrdf_load_stackoverflow)
GB (1) GB1338208A (enrdf_load_stackoverflow)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1327572A (en) * 1971-03-23 1973-08-22 Ass Elect Ind Apparatus for use in charged particle spectroscopy
US3870882A (en) * 1973-05-23 1975-03-11 Gca Corp Esca x-ray source
JPS5831700B2 (ja) * 1975-06-06 1983-07-07 ニホンシンクウギジユツ カブシキガイシヤ イオンシツリヨウブンセキソウチ
US4048498A (en) * 1976-09-01 1977-09-13 Physical Electronics Industries, Inc. Scanning auger microprobe with variable axial aperture
JPS597736Y2 (ja) * 1977-02-25 1984-03-09 日本電子株式会社 電子分光装置
DE2851743C2 (de) * 1978-11-30 1980-08-28 Kernforschungsanlage Juelich Gmbh, 5170 Juelich ElektronenstoBspektrometer
US4224518A (en) * 1978-12-21 1980-09-23 Varian Associates, Inc. Multistage cylindrical mirror analyzer incorporating a coaxial electron gun
US4367406A (en) * 1981-01-13 1983-01-04 Trustees Of Boston University Cylindrical mirror electrostatic energy analyzer free of third-order angular aberrations
US5032724A (en) * 1990-08-09 1991-07-16 The Perkin-Elmer Corporation Multichannel charged-particle analyzer
US6184523B1 (en) * 1998-07-14 2001-02-06 Board Of Regents Of The University Of Nebraska High resolution charged particle-energy detecting, multiple sequential stage, compact, small diameter, retractable cylindrical mirror analyzer system, and method of use
JPWO2008114684A1 (ja) * 2007-03-16 2010-07-01 国立大学法人 奈良先端科学技術大学院大学 エネルギー分析器、２次元表示型エネルギー分析器および光電子顕微鏡
GB0720901D0 (en) * 2007-10-24 2007-12-05 Shimadzu Res Lab Europe Ltd Charged particle energy analysers
US8071942B2 (en) * 2009-03-20 2011-12-06 Physical Electronics USA, Inc. Sample holder apparatus to reduce energy of electrons in an analyzer system and method
WO2011009065A2 (en) * 2009-07-17 2011-01-20 Kla-Tencor Corporation Charged-particle energy analyzer
CN106568832A (zh) * 2016-10-31 2017-04-19 中国科学院国家空间科学中心 一种用于空间热等离子体能量和成分测量的传感器装置
CN110618443B (zh) * 2019-08-26 2021-04-13 北京控制工程研究所 一种等离子体推力器稳态离子流场测量装置及测量方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3582649A (en) * 1968-10-21 1971-06-01 Varian Associates Retarding field electron diffraction spectrometer having improved resolution
US3596091A (en) * 1969-05-19 1971-07-27 Varian Associates Induced electron emission spectrometer having a unipotential sample chamber
US3631238A (en) * 1969-11-17 1971-12-28 North American Rockwell Method of measuring electric potential on an object surface using auger electron spectroscopy

Also Published As

Publication number Publication date
GB1338208A (en) 1973-11-21
DE2241612B2 (de) 1976-01-15
US3699331A (en) 1972-10-17
JPS4832589A (enrdf_load_stackoverflow) 1973-04-28
FR2150887B1 (enrdf_load_stackoverflow) 1976-08-13
FR2150887A1 (enrdf_load_stackoverflow) 1973-04-13
DE2241612A1 (de) 1973-03-08

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