GB1324792A - Microelectronic component manufacture - Google Patents
Microelectronic component manufactureInfo
- Publication number
- GB1324792A GB1324792A GB4991770A GB4991770A GB1324792A GB 1324792 A GB1324792 A GB 1324792A GB 4991770 A GB4991770 A GB 4991770A GB 4991770 A GB4991770 A GB 4991770A GB 1324792 A GB1324792 A GB 1324792A
- Authority
- GB
- United Kingdom
- Prior art keywords
- etch
- photo
- mask
- microelectronic component
- preparation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/54—Absorbers, e.g. of opaque materials
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03C—PHOTOSENSITIVE MATERIALS FOR PHOTOGRAPHIC PURPOSES; PHOTOGRAPHIC PROCESSES, e.g. CINE, X-RAY, COLOUR, STEREO-PHOTOGRAPHIC PROCESSES; AUXILIARY PROCESSES IN PHOTOGRAPHY
- G03C5/00—Photographic processes or agents therefor; Regeneration of such processing agents
- G03C5/26—Processes using silver-salt-containing photosensitive materials or agents therefor
- G03C5/40—Chemically transforming developed images
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03C—PHOTOSENSITIVE MATERIALS FOR PHOTOGRAPHIC PURPOSES; PHOTOGRAPHIC PROCESSES, e.g. CINE, X-RAY, COLOUR, STEREO-PHOTOGRAPHIC PROCESSES; AUXILIARY PROCESSES IN PHOTOGRAPHY
- G03C5/00—Photographic processes or agents therefor; Regeneration of such processing agents
- G03C5/26—Processes using silver-salt-containing photosensitive materials or agents therefor
- G03C5/40—Chemically transforming developed images
- G03C5/48—Mordanting
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/0002—Apparatus or processes for manufacturing printed circuits for manufacturing artworks for printed circuits
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Silver Salt Photography Or Processing Solution Therefor (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
- Electrolytic Production Of Metals (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US87417869A | 1969-11-05 | 1969-11-05 |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1324792A true GB1324792A (en) | 1973-07-25 |
Family
ID=25363161
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB4991770A Expired GB1324792A (en) | 1969-11-05 | 1970-10-21 | Microelectronic component manufacture |
Country Status (5)
Country | Link |
---|---|
US (1) | US3666648A (fr) |
JP (1) | JPS5036765B1 (fr) |
DE (1) | DE2054306A1 (fr) |
FR (1) | FR2071742A5 (fr) |
GB (1) | GB1324792A (fr) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50156931A (fr) * | 1974-06-08 | 1975-12-18 | ||
JPS5155233A (en) * | 1974-11-09 | 1976-05-14 | Shaken Kk | Karaamojikaado oyobi sonosakuseihoho |
JPS5299170U (fr) * | 1976-01-21 | 1977-07-26 | ||
US5866303A (en) | 1997-10-15 | 1999-02-02 | Kabushiki Kaisha Toshiba | Resist developing method by magnetic field controlling, resist developing apparatus and method of fabricating semiconductor device |
EP2244283A4 (fr) * | 2008-02-15 | 2012-01-04 | Lion Corp | Composition nettoyante et procédé de nettoyage de substrat pour dispositif électronique |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US1564753A (en) * | 1925-12-08 | John g | ||
US1632740A (en) * | 1927-06-14 | Indttstrie axtiengesellschaft | ||
US1857089A (en) * | 1932-05-03 | Ing cobpobation | ||
US1245152A (en) * | 1916-09-15 | 1917-11-06 | Abel Boularan Dit Deval | Process for improving photographic negatives. |
US1525766A (en) * | 1922-07-12 | 1925-02-10 | Eastman Kodak Co | Color photography |
US1962348A (en) * | 1929-11-13 | 1934-06-12 | Eastman Kodak Co | Photographic reversal process |
US1970869A (en) * | 1931-01-17 | 1934-08-21 | Agfa Ansco Corp | Photographic reversal development |
US2068879A (en) * | 1933-09-09 | 1937-01-26 | Cambridge Trust Company | Photographic relief process |
US2193023A (en) * | 1938-04-06 | 1940-03-12 | Eastman Kodak Co | Photographic reversal process |
US2500052A (en) * | 1948-06-02 | 1950-03-07 | Eastman Kodak Co | Photographic reversal copying process |
US2676101A (en) * | 1950-12-21 | 1954-04-20 | Rca Corp | Method of reversal processing sound tracks |
DE1071478B (fr) * | 1957-03-01 | |||
BE573379A (fr) * | 1957-11-29 | |||
US3268331A (en) * | 1962-05-24 | 1966-08-23 | Itek Corp | Persistent internal polarization systems |
US3244083A (en) * | 1962-10-23 | 1966-04-05 | Xerox Corp | Xerographic device |
US3271145A (en) * | 1963-12-23 | 1966-09-06 | Eastman Kodak Co | Process for producing an electrostatic charge image |
US3471387A (en) * | 1965-08-02 | 1969-10-07 | Carter S Ink Co | Electrophoretic printing medium |
-
1969
- 1969-11-05 US US874178A patent/US3666648A/en not_active Expired - Lifetime
-
1970
- 1970-09-28 FR FR7036294A patent/FR2071742A5/fr not_active Expired
- 1970-10-21 GB GB4991770A patent/GB1324792A/en not_active Expired
- 1970-11-04 DE DE19702054306 patent/DE2054306A1/de active Pending
- 1970-11-04 JP JP45096542A patent/JPS5036765B1/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
JPS5036765B1 (fr) | 1975-11-27 |
DE2054306A1 (de) | 1971-05-13 |
FR2071742A5 (fr) | 1971-09-17 |
US3666648A (en) | 1972-05-30 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PS | Patent sealed [section 19, patents act 1949] | ||
PCNP | Patent ceased through non-payment of renewal fee |