GB1320594A - Manufacture of semi-conductor devices - Google Patents
Manufacture of semi-conductor devicesInfo
- Publication number
- GB1320594A GB1320594A GB4567471A GB4567471A GB1320594A GB 1320594 A GB1320594 A GB 1320594A GB 4567471 A GB4567471 A GB 4567471A GB 4567471 A GB4567471 A GB 4567471A GB 1320594 A GB1320594 A GB 1320594A
- Authority
- GB
- United Kingdom
- Prior art keywords
- manufacture
- film
- electrodes
- sept
- semi
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 title abstract 3
- 238000004519 manufacturing process Methods 0.000 title abstract 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- 238000000034 method Methods 0.000 abstract 2
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 abstract 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 abstract 1
- 239000004411 aluminium Substances 0.000 abstract 1
- 229910052782 aluminium Inorganic materials 0.000 abstract 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract 1
- 230000008021 deposition Effects 0.000 abstract 1
- 239000011777 magnesium Substances 0.000 abstract 1
- 229910052749 magnesium Inorganic materials 0.000 abstract 1
- 229910052751 metal Inorganic materials 0.000 abstract 1
- 239000002184 metal Substances 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
- 239000010936 titanium Substances 0.000 abstract 1
- 229910052719 titanium Inorganic materials 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/482—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of lead-in layers inseparably applied to the semiconductor body
- H01L23/485—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of lead-in layers inseparably applied to the semiconductor body consisting of layered constructions comprising conductive layers and insulating layers, e.g. planar contacts
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Abstract
1320594 Electrode deposition for semiconductor devices SIEMENS AG 30 Sept 1971 [30 Sept 1970] 45674/71 Heading H1K An electrode metal (aluminium, magnesium, or titanium) is vapour deposited onto an insulating film (silica or alumina) on a semiconductor body at a uniform rate sufficiently high that the deposit grows at least 100 A/sec. The body and film may be maintained at a temperature in the range 150-300‹ C. during the process. The process is used in the manufacture of the gate electrodes of IGFETs or of contact electrodes (which extend also over the film) in diodes and bipolar transistors or of electrodes in integrated circuits.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19702047951 DE2047951C3 (en) | 1970-09-30 | 1970-09-30 | Method for manufacturing a semiconductor component |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1320594A true GB1320594A (en) | 1973-06-13 |
Family
ID=5783733
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB4567471A Expired GB1320594A (en) | 1970-09-30 | 1971-09-30 | Manufacture of semi-conductor devices |
Country Status (9)
| Country | Link |
|---|---|
| BE (1) | BE773195A (en) |
| CA (1) | CA922819A (en) |
| CH (1) | CH528820A (en) |
| DE (1) | DE2047951C3 (en) |
| FR (1) | FR2108115B1 (en) |
| GB (1) | GB1320594A (en) |
| IT (1) | IT938833B (en) |
| LU (1) | LU63976A1 (en) |
| NL (1) | NL7111383A (en) |
-
1970
- 1970-09-30 DE DE19702047951 patent/DE2047951C3/en not_active Expired
-
1971
- 1971-08-06 CH CH1159871A patent/CH528820A/en not_active IP Right Cessation
- 1971-08-18 NL NL7111383A patent/NL7111383A/xx unknown
- 1971-09-27 IT IT2913971A patent/IT938833B/en active
- 1971-09-28 LU LU63976D patent/LU63976A1/xx unknown
- 1971-09-28 CA CA123855A patent/CA922819A/en not_active Expired
- 1971-09-28 BE BE773195A patent/BE773195A/en unknown
- 1971-09-29 FR FR7135096A patent/FR2108115B1/fr not_active Expired
- 1971-09-30 GB GB4567471A patent/GB1320594A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| DE2047951A1 (en) | 1972-04-06 |
| DE2047951C3 (en) | 1980-02-14 |
| DE2047951B2 (en) | 1979-06-13 |
| CH528820A (en) | 1972-09-30 |
| IT938833B (en) | 1973-02-10 |
| NL7111383A (en) | 1972-04-05 |
| CA922819A (en) | 1973-03-13 |
| LU63976A1 (en) | 1972-03-01 |
| BE773195A (en) | 1972-01-17 |
| FR2108115B1 (en) | 1977-04-22 |
| FR2108115A1 (en) | 1972-05-12 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PS | Patent sealed | ||
| PLNP | Patent lapsed through nonpayment of renewal fees |