CA959383A - Thick oxide process for improving metal deposition and stability of semiconductor devices - Google Patents
Thick oxide process for improving metal deposition and stability of semiconductor devicesInfo
- Publication number
- CA959383A CA959383A CA158,352A CA158352A CA959383A CA 959383 A CA959383 A CA 959383A CA 158352 A CA158352 A CA 158352A CA 959383 A CA959383 A CA 959383A
- Authority
- CA
- Canada
- Prior art keywords
- stability
- semiconductor devices
- metal deposition
- thick oxide
- oxide process
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001465 metallisation Methods 0.000 title 1
- 238000000034 method Methods 0.000 title 1
- 239000004065 semiconductor Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/482—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of lead-in layers inseparably applied to the semiconductor body
- H01L23/485—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of lead-in layers inseparably applied to the semiconductor body consisting of layered constructions comprising conductive layers and insulating layers, e.g. planar contacts
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/033—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/311—Etching the insulating layers by chemical or physical means
- H01L21/31105—Etching inorganic layers
- H01L21/31111—Etching inorganic layers by chemical means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Ceramic Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Weting (AREA)
- Electrodes Of Semiconductors (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
- Formation Of Insulating Films (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US24128472A | 1972-04-05 | 1972-04-05 |
Publications (1)
Publication Number | Publication Date |
---|---|
CA959383A true CA959383A (en) | 1974-12-17 |
Family
ID=22910046
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CA158,352A Expired CA959383A (en) | 1972-04-05 | 1972-12-07 | Thick oxide process for improving metal deposition and stability of semiconductor devices |
Country Status (7)
Country | Link |
---|---|
JP (1) | JPS4910673A (en) |
CA (1) | CA959383A (en) |
DE (1) | DE2302264A1 (en) |
FR (1) | FR2178859B3 (en) |
GB (1) | GB1361357A (en) |
IT (1) | IT976934B (en) |
NL (1) | NL7303610A (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5128755A (en) * | 1974-09-04 | 1976-03-11 | Nippon Electric Co | Handotaisochi no seizohoho |
JPH03198327A (en) * | 1989-12-26 | 1991-08-29 | Fujitsu Ltd | Manufacture of semiconductor device |
-
1972
- 1972-12-07 CA CA158,352A patent/CA959383A/en not_active Expired
- 1972-12-11 GB GB5703772A patent/GB1361357A/en not_active Expired
-
1973
- 1973-01-17 IT IT4774473A patent/IT976934B/en active
- 1973-01-18 DE DE19732302264 patent/DE2302264A1/en active Pending
- 1973-02-06 FR FR7304074A patent/FR2178859B3/fr not_active Expired
- 1973-03-15 NL NL7303610A patent/NL7303610A/xx unknown
- 1973-03-20 JP JP3255973A patent/JPS4910673A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
FR2178859A1 (en) | 1973-11-16 |
NL7303610A (en) | 1973-10-09 |
DE2302264A1 (en) | 1973-10-25 |
JPS4910673A (en) | 1974-01-30 |
GB1361357A (en) | 1974-07-24 |
FR2178859B3 (en) | 1976-01-30 |
IT976934B (en) | 1974-09-10 |
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