GB1319431A - Non-crucible zone melting of crystalline rods - Google Patents

Non-crucible zone melting of crystalline rods

Info

Publication number
GB1319431A
GB1319431A GB4716171A GB4716171A GB1319431A GB 1319431 A GB1319431 A GB 1319431A GB 4716171 A GB4716171 A GB 4716171A GB 4716171 A GB4716171 A GB 4716171A GB 1319431 A GB1319431 A GB 1319431A
Authority
GB
United Kingdom
Prior art keywords
supports
rod
rotation
oct
zone
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB4716171A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Publication of GB1319431A publication Critical patent/GB1319431A/en
Expired legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B13/00Single-crystal growth by zone-melting; Refining by zone-melting
    • C30B13/28Controlling or regulating
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B13/00Single-crystal growth by zone-melting; Refining by zone-melting
    • C30B13/32Mechanisms for moving either the charge or the heater

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Silicon Compounds (AREA)

Abstract

1319431 Zone melting SIEMENS AG 11 Oct 1971 [21 Oct 1970] 47161/71 Heading BIS In an induction coil zone melt process wherein a crystalline rod e.g. silicon, is supported at its end and the rod is rotated by at least one of the supports, the rotation of at least one of the supports with respect to the other is non-uniform and the speed of rotation subjected to a constantly periodic variation e.g. from a value of zero to a chosen maximum value then decelerated to zero and the cycle repeated. As shown container 1 is provided with vacuum tight seals 2 and 3, for drive shafts 4 and 5 for rotating a vertically mounted crystalline rod 6, 18, which is held in supports 7 and 8. The supports can also be moved in the direction of the axis of the rod. In order to produce non-uniform rotation of for example support 8, the rotational motor (not shown) for the drive shaft 5, is driven with a sinusoidal current. The molten zone 9 is formed by coil 10. The process may be carried out in a vacuum or in a protective gas supplied from container 15 via a line 14. Window 12 allows viewing.
GB4716171A 1970-10-21 1971-10-11 Non-crucible zone melting of crystalline rods Expired GB1319431A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19702051703 DE2051703A1 (en) 1970-10-21 1970-10-21 Process for zone melting a crystalline rod, in particular made of silicon

Publications (1)

Publication Number Publication Date
GB1319431A true GB1319431A (en) 1973-06-06

Family

ID=5785765

Family Applications (1)

Application Number Title Priority Date Filing Date
GB4716171A Expired GB1319431A (en) 1970-10-21 1971-10-11 Non-crucible zone melting of crystalline rods

Country Status (5)

Country Link
BE (1) BE774263A (en)
DE (1) DE2051703A1 (en)
FR (1) FR2111522A5 (en)
GB (1) GB1319431A (en)
NL (1) NL7111934A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114318497A (en) * 2022-01-25 2022-04-12 洛阳市自动化研究所有限公司 Zone melting furnace for preparing alloy crystal bar
CN118006903A (en) * 2024-02-07 2024-05-10 河北龙凤山辰昕新材料科技有限公司 Process for preparing ultra-pure metal by continuous UHV vertical floating zone melting

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114381803B (en) * 2022-01-12 2022-11-25 洛阳师范学院 Silicon crystal drawing device borne by robot central control operation system

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114318497A (en) * 2022-01-25 2022-04-12 洛阳市自动化研究所有限公司 Zone melting furnace for preparing alloy crystal bar
CN118006903A (en) * 2024-02-07 2024-05-10 河北龙凤山辰昕新材料科技有限公司 Process for preparing ultra-pure metal by continuous UHV vertical floating zone melting

Also Published As

Publication number Publication date
NL7111934A (en) 1972-04-25
BE774263A (en) 1972-04-21
DE2051703A1 (en) 1972-04-27
FR2111522A5 (en) 1972-06-02

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Legal Events

Date Code Title Description
PS Patent sealed
PLNP Patent lapsed through nonpayment of renewal fees