GB1315178A - Apparatus for photographing an image of a specimen - Google Patents

Apparatus for photographing an image of a specimen

Info

Publication number
GB1315178A
GB1315178A GB3846170A GB3846170A GB1315178A GB 1315178 A GB1315178 A GB 1315178A GB 3846170 A GB3846170 A GB 3846170A GB 3846170 A GB3846170 A GB 3846170A GB 1315178 A GB1315178 A GB 1315178A
Authority
GB
United Kingdom
Prior art keywords
control circuit
specimen
circuit
region
signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB3846170A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Publication of GB1315178A publication Critical patent/GB1315178A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/22—Optical, image processing or photographic arrangements associated with the tube
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B17/00—Details of cameras or camera bodies; Accessories therefor
    • G03B17/48—Details of cameras or camera bodies; Accessories therefor adapted for combination with other photographic or optical apparatus
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
GB3846170A 1969-08-11 1970-08-10 Apparatus for photographing an image of a specimen Expired GB1315178A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP44062876A JPS4834347B1 (enExample) 1969-08-11 1969-08-11

Publications (1)

Publication Number Publication Date
GB1315178A true GB1315178A (en) 1973-04-26

Family

ID=13212891

Family Applications (1)

Application Number Title Priority Date Filing Date
GB3846170A Expired GB1315178A (en) 1969-08-11 1970-08-10 Apparatus for photographing an image of a specimen

Country Status (3)

Country Link
US (1) US3719776A (enExample)
JP (1) JPS4834347B1 (enExample)
GB (1) GB1315178A (enExample)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3886304A (en) * 1973-06-14 1975-05-27 Information Int Inc Phototypesetting system
US4128765A (en) * 1976-10-29 1978-12-05 Joseph Franks Ion beam machining techniques and apparatus
JPS5562652A (en) * 1978-11-01 1980-05-12 Internatl Precision Inc Image photographing and its device in electron microscope
DE3008404C2 (de) * 1980-03-05 1984-07-19 Helmut 8046 Garching Formanek Verfahren und Einrichtung zum Erzeugen von Elektronenstrahl-Beugungsbildern
US4374327A (en) * 1981-01-27 1983-02-15 George Christov Device for indicating specimen stage positions in an electron microscope
JPS5814460A (ja) * 1981-07-17 1983-01-27 Internatl Precision Inc 電子顕微鏡の焦点合わせ方法及びこの方法を応用した像撮影方法及び装置
US4449084A (en) * 1981-12-28 1984-05-15 University Of Pittsburgh Positioning servo-mechanism or tachometer employing self-scanning light sensing array
US4462045A (en) * 1981-12-28 1984-07-24 Polaroid Corporation Method of and apparatus for documenting and inspecting a cargo container
SE455736B (sv) * 1984-03-15 1988-08-01 Sarastro Ab Forfaringssett och anordning for mikrofotometrering och efterfoljande bildsammanstellning
ATE70914T1 (de) * 1984-03-20 1992-01-15 Vickers Plc Verfahren zum praezisionsmessen mittels eines abtastelelektronenmikroskops.
JPH02174046A (ja) * 1988-12-27 1990-07-05 Hitachi Ltd 電子顕微鏡およびこれに用いる試料微動装置の制御方法
US5479252A (en) * 1993-06-17 1995-12-26 Ultrapointe Corporation Laser imaging system for inspection and analysis of sub-micron particles
US5923430A (en) 1993-06-17 1999-07-13 Ultrapointe Corporation Method for characterizing defects on semiconductor wafers
US6148114A (en) * 1996-11-27 2000-11-14 Ultrapointe Corporation Ring dilation and erosion techniques for digital image processing

Also Published As

Publication number Publication date
US3719776A (en) 1973-03-06
JPS4834347B1 (enExample) 1973-10-20

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee