GB1303944A - - Google Patents
Info
- Publication number
- GB1303944A GB1303944A GB1095271A GB1095271A GB1303944A GB 1303944 A GB1303944 A GB 1303944A GB 1095271 A GB1095271 A GB 1095271A GB 1095271 A GB1095271 A GB 1095271A GB 1303944 A GB1303944 A GB 1303944A
- Authority
- GB
- United Kingdom
- Prior art keywords
- zone
- april
- melting
- nozzle
- supplied
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 abstract 2
- 238000004857 zone melting Methods 0.000 abstract 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 abstract 1
- XYFCBTPGUUZFHI-UHFFFAOYSA-N Phosphine Chemical compound P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 abstract 1
- 229910052786 argon Inorganic materials 0.000 abstract 1
- 239000012159 carrier gas Substances 0.000 abstract 1
- 239000003795 chemical substances by application Substances 0.000 abstract 1
- 239000000498 cooling water Substances 0.000 abstract 1
- 239000002019 doping agent Substances 0.000 abstract 1
- 239000007789 gas Substances 0.000 abstract 1
- 238000010438 heat treatment Methods 0.000 abstract 1
- 239000001257 hydrogen Substances 0.000 abstract 1
- 229910052739 hydrogen Inorganic materials 0.000 abstract 1
- 230000006698 induction Effects 0.000 abstract 1
- 239000000463 material Substances 0.000 abstract 1
- 230000001681 protective effect Effects 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 abstract 1
- 229910052710 silicon Inorganic materials 0.000 abstract 1
- 239000010703 silicon Substances 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
- C30B13/08—Single-crystal growth by zone-melting; Refining by zone-melting adding crystallising materials or reactants forming it in situ to the molten zone
- C30B13/10—Single-crystal growth by zone-melting; Refining by zone-melting adding crystallising materials or reactants forming it in situ to the molten zone with addition of doping materials
- C30B13/12—Single-crystal growth by zone-melting; Refining by zone-melting adding crystallising materials or reactants forming it in situ to the molten zone with addition of doping materials in the gaseous or vapour state
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Silicon Compounds (AREA)
- General Induction Heating (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19702020182 DE2020182C3 (de) | 1970-04-24 | 1970-04-24 | Vorrichtung zum Dotieren von Halbleitermaterial beim tiegelfreien Zonenschmelzen |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1303944A true GB1303944A (enrdf_load_stackoverflow) | 1973-01-24 |
Family
ID=5769283
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB1095271A Expired GB1303944A (enrdf_load_stackoverflow) | 1970-04-24 | 1971-04-23 |
Country Status (6)
| Country | Link |
|---|---|
| BE (1) | BE766213A (enrdf_load_stackoverflow) |
| DE (1) | DE2020182C3 (enrdf_load_stackoverflow) |
| DK (1) | DK138257C (enrdf_load_stackoverflow) |
| FR (1) | FR2090608A5 (enrdf_load_stackoverflow) |
| GB (1) | GB1303944A (enrdf_load_stackoverflow) |
| NL (1) | NL7104547A (enrdf_load_stackoverflow) |
-
1970
- 1970-04-24 DE DE19702020182 patent/DE2020182C3/de not_active Expired
-
1971
- 1971-04-05 NL NL7104547A patent/NL7104547A/xx unknown
- 1971-04-23 DK DK195971A patent/DK138257C/da active
- 1971-04-23 BE BE766213A patent/BE766213A/xx unknown
- 1971-04-23 FR FR7114488A patent/FR2090608A5/fr not_active Expired
- 1971-04-23 GB GB1095271A patent/GB1303944A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| DE2020182B2 (de) | 1973-09-20 |
| DE2020182C3 (de) | 1974-05-02 |
| FR2090608A5 (enrdf_load_stackoverflow) | 1972-01-14 |
| BE766213A (fr) | 1971-10-25 |
| NL7104547A (enrdf_load_stackoverflow) | 1971-10-26 |
| DK138257C (da) | 1979-01-22 |
| DE2020182A1 (de) | 1971-11-11 |
| DK138257B (da) | 1978-08-07 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PS | Patent sealed | ||
| PLNP | Patent lapsed through nonpayment of renewal fees |