GB1302886A - - Google Patents

Info

Publication number
GB1302886A
GB1302886A GB1026570A GB1026570A GB1302886A GB 1302886 A GB1302886 A GB 1302886A GB 1026570 A GB1026570 A GB 1026570A GB 1026570 A GB1026570 A GB 1026570A GB 1302886 A GB1302886 A GB 1302886A
Authority
GB
United Kingdom
Prior art keywords
coils
stigmator
deflection
current
elements
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB1026570A
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of GB1302886A publication Critical patent/GB1302886A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
    • H01J37/1472—Deflecting along given lines
    • H01J37/1474—Scanning means
    • H01J37/1475—Scanning means magnetic

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Electron Beam Exposure (AREA)
GB1026570A 1969-03-05 1970-03-04 Expired GB1302886A (enrdf_load_stackoverflow)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19691912235 DE1912235B1 (de) 1969-03-05 1969-03-05 Korpuskularstrahlgeraet mit einem Ablenksystem und einem Stigmator

Publications (1)

Publication Number Publication Date
GB1302886A true GB1302886A (enrdf_load_stackoverflow) 1973-01-10

Family

ID=5727738

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1026570A Expired GB1302886A (enrdf_load_stackoverflow) 1969-03-05 1970-03-04

Country Status (4)

Country Link
DE (1) DE1912235B1 (enrdf_load_stackoverflow)
FR (1) FR2037602A5 (enrdf_load_stackoverflow)
GB (1) GB1302886A (enrdf_load_stackoverflow)
NL (1) NL7000299A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1482532A1 (en) * 2003-05-26 2004-12-01 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Gradient field deflector

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3371206A (en) * 1964-02-04 1968-02-27 Jeol Ltd Electron beam apparatus having compensating means for triangular beam distortion

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1482532A1 (en) * 2003-05-26 2004-12-01 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Gradient field deflector

Also Published As

Publication number Publication date
FR2037602A5 (enrdf_load_stackoverflow) 1970-12-31
NL7000299A (enrdf_load_stackoverflow) 1970-09-08
DE1912235B1 (de) 1970-03-19

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Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee