NL7000299A - - Google Patents

Info

Publication number
NL7000299A
NL7000299A NL7000299A NL7000299A NL7000299A NL 7000299 A NL7000299 A NL 7000299A NL 7000299 A NL7000299 A NL 7000299A NL 7000299 A NL7000299 A NL 7000299A NL 7000299 A NL7000299 A NL 7000299A
Authority
NL
Netherlands
Application number
NL7000299A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of NL7000299A publication Critical patent/NL7000299A/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
    • H01J37/1472—Deflecting along given lines
    • H01J37/1474—Scanning means
    • H01J37/1475—Scanning means magnetic

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Electron Beam Exposure (AREA)
NL7000299A 1969-03-05 1970-01-09 NL7000299A (enrdf_load_stackoverflow)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19691912235 DE1912235B1 (de) 1969-03-05 1969-03-05 Korpuskularstrahlgeraet mit einem Ablenksystem und einem Stigmator

Publications (1)

Publication Number Publication Date
NL7000299A true NL7000299A (enrdf_load_stackoverflow) 1970-09-08

Family

ID=5727738

Family Applications (1)

Application Number Title Priority Date Filing Date
NL7000299A NL7000299A (enrdf_load_stackoverflow) 1969-03-05 1970-01-09

Country Status (4)

Country Link
DE (1) DE1912235B1 (enrdf_load_stackoverflow)
FR (1) FR2037602A5 (enrdf_load_stackoverflow)
GB (1) GB1302886A (enrdf_load_stackoverflow)
NL (1) NL7000299A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1482532A1 (en) * 2003-05-26 2004-12-01 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Gradient field deflector

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3371206A (en) * 1964-02-04 1968-02-27 Jeol Ltd Electron beam apparatus having compensating means for triangular beam distortion

Also Published As

Publication number Publication date
GB1302886A (enrdf_load_stackoverflow) 1973-01-10
FR2037602A5 (enrdf_load_stackoverflow) 1970-12-31
DE1912235B1 (de) 1970-03-19

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