FR2037602A5 - - Google Patents

Info

Publication number
FR2037602A5
FR2037602A5 FR7007724A FR7007724A FR2037602A5 FR 2037602 A5 FR2037602 A5 FR 2037602A5 FR 7007724 A FR7007724 A FR 7007724A FR 7007724 A FR7007724 A FR 7007724A FR 2037602 A5 FR2037602 A5 FR 2037602A5
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7007724A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens Corp
Original Assignee
Siemens Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Corp filed Critical Siemens Corp
Application granted granted Critical
Publication of FR2037602A5 publication Critical patent/FR2037602A5/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
    • H01J37/1472—Deflecting along given lines
    • H01J37/1474—Scanning means
    • H01J37/1475—Scanning means magnetic

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Electron Beam Exposure (AREA)
FR7007724A 1969-03-05 1970-03-04 Expired FR2037602A5 (enrdf_load_stackoverflow)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19691912235 DE1912235B1 (de) 1969-03-05 1969-03-05 Korpuskularstrahlgeraet mit einem Ablenksystem und einem Stigmator

Publications (1)

Publication Number Publication Date
FR2037602A5 true FR2037602A5 (enrdf_load_stackoverflow) 1970-12-31

Family

ID=5727738

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7007724A Expired FR2037602A5 (enrdf_load_stackoverflow) 1969-03-05 1970-03-04

Country Status (4)

Country Link
DE (1) DE1912235B1 (enrdf_load_stackoverflow)
FR (1) FR2037602A5 (enrdf_load_stackoverflow)
GB (1) GB1302886A (enrdf_load_stackoverflow)
NL (1) NL7000299A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1482532A1 (en) * 2003-05-26 2004-12-01 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Gradient field deflector

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3371206A (en) * 1964-02-04 1968-02-27 Jeol Ltd Electron beam apparatus having compensating means for triangular beam distortion

Also Published As

Publication number Publication date
DE1912235B1 (de) 1970-03-19
NL7000299A (enrdf_load_stackoverflow) 1970-09-08
GB1302886A (enrdf_load_stackoverflow) 1973-01-10

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Legal Events

Date Code Title Description
ST Notification of lapse