GB1295285A - - Google Patents
Info
- Publication number
- GB1295285A GB1295285A GB1295285DA GB1295285A GB 1295285 A GB1295285 A GB 1295285A GB 1295285D A GB1295285D A GB 1295285DA GB 1295285 A GB1295285 A GB 1295285A
- Authority
- GB
- United Kingdom
- Prior art keywords
- silica
- chamber
- electrode
- april
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 8
- 239000000377 silicon dioxide Substances 0.000 abstract 4
- 238000004544 sputter deposition Methods 0.000 abstract 2
- 239000000758 substrate Substances 0.000 abstract 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract 1
- 239000011248 coating agent Substances 0.000 abstract 1
- 238000000576 coating method Methods 0.000 abstract 1
- 239000011521 glass Substances 0.000 abstract 1
- 239000000463 material Substances 0.000 abstract 1
- 239000002184 metal Substances 0.000 abstract 1
- 238000012986 modification Methods 0.000 abstract 1
- 230000004048 modification Effects 0.000 abstract 1
- 150000004767 nitrides Chemical class 0.000 abstract 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Surface Treatment Of Glass (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB2121869 | 1969-04-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1295285A true GB1295285A (enrdf_load_stackoverflow) | 1972-11-08 |
Family
ID=10159181
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB1295285D Expired GB1295285A (enrdf_load_stackoverflow) | 1969-04-25 | 1969-04-25 |
Country Status (1)
| Country | Link |
|---|---|
| GB (1) | GB1295285A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2243844A (en) * | 1990-05-01 | 1991-11-13 | Atomic Energy Authority Uk | Coating of filaments by sputter-ion-plating |
-
1969
- 1969-04-25 GB GB1295285D patent/GB1295285A/en not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2243844A (en) * | 1990-05-01 | 1991-11-13 | Atomic Energy Authority Uk | Coating of filaments by sputter-ion-plating |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| ES333127A1 (es) | Un procedimiento para depositar por pulverizacion catodica sobre un substrato una capa delgada de metal. | |
| ZA741303B (en) | Plasma etching and deposition | |
| GB1294025A (en) | Rf sputtering | |
| GB1371462A (en) | Apparatus for coating workpieces | |
| GB1405489A (en) | Sputtering apparatus | |
| GB1295285A (enrdf_load_stackoverflow) | ||
| CA978728A (en) | Process for the production of tube from ductile metal | |
| JPS52133162A (en) | Production of vacuum bottle fabricated from metal | |
| GB1333617A (en) | Cathode sputtering apparatus | |
| JPS5367684A (en) | Method and apparatus for continuously coating glass or ceramic substrate by cathode sputtering | |
| JPS5399082A (en) | High frequency sputtering apparatus | |
| GB1299945A (en) | Sputtering apparatus | |
| NL6918217A (en) | Apparatus for evaporating metal on a - wire or strip | |
| CA816656A (en) | Deposition method of refractory metal | |
| JPS5319847A (en) | Electrochromic display element | |
| JPS52156239A (en) | Noise preventive discharge electrode | |
| AU431241B2 (en) | Improved process of metal plating non-metallic substrates | |
| JPS5399081A (en) | Sputtering apparatus | |
| GB1304625A (enrdf_load_stackoverflow) | ||
| CA923676A (en) | Process of continuously casting a liquid metal | |
| AU418574B2 (en) | Chromising of ferrous metal substrates | |
| CA768581A (en) | Method of determining rate of deposition of metallic vapors | |
| AU4308568A (en) | Improved process of metal plating non-metallic substrates | |
| AU699266A (en) | Chromising of ferrous metal substrates | |
| JPS5260997A (en) | Manufacturing of dielectric thin film |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PS | Patent sealed | ||
| PCNP | Patent ceased through non-payment of renewal fee |