CA816656A - Deposition method of refractory metal - Google Patents

Deposition method of refractory metal

Info

Publication number
CA816656A
CA816656A CA816656A CA816656DA CA816656A CA 816656 A CA816656 A CA 816656A CA 816656 A CA816656 A CA 816656A CA 816656D A CA816656D A CA 816656DA CA 816656 A CA816656 A CA 816656A
Authority
CA
Canada
Prior art keywords
deposition method
refractory metal
refractory
metal
deposition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA816656A
Inventor
Inoue Morio
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electronics Corp
Publication date
Application granted granted Critical
Publication of CA816656A publication Critical patent/CA816656A/en
Expired legal-status Critical Current

Links

CA816656A Deposition method of refractory metal Expired CA816656A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA816656T

Publications (1)

Publication Number Publication Date
CA816656A true CA816656A (en) 1969-07-01

Family

ID=36289188

Family Applications (1)

Application Number Title Priority Date Filing Date
CA816656A Expired CA816656A (en) Deposition method of refractory metal

Country Status (1)

Country Link
CA (1) CA816656A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3996400A (en) * 1973-04-25 1976-12-07 Centre Stephanois De Recherches Mecaniques Hydromecanique Et Frottement Method for surface coating ferrous alloy parts

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3996400A (en) * 1973-04-25 1976-12-07 Centre Stephanois De Recherches Mecaniques Hydromecanique Et Frottement Method for surface coating ferrous alloy parts

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