GB1292199A - Method and device for the production of an ion beam having a large cross-sectional area - Google Patents

Method and device for the production of an ion beam having a large cross-sectional area

Info

Publication number
GB1292199A
GB1292199A GB29286/70A GB2928670A GB1292199A GB 1292199 A GB1292199 A GB 1292199A GB 29286/70 A GB29286/70 A GB 29286/70A GB 2928670 A GB2928670 A GB 2928670A GB 1292199 A GB1292199 A GB 1292199A
Authority
GB
United Kingdom
Prior art keywords
plates
ions
period
ion beam
transit time
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB29286/70A
Other languages
English (en)
Inventor
Georges Guernet
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Publication of GB1292199A publication Critical patent/GB1292199A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
    • H01J37/3171—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation for ion implantation
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/08—Deviation, concentration or focusing of the beam by electric or magnetic means
    • G21K1/087—Deviation, concentration or focusing of the beam by electric or magnetic means by electrical means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Combustion & Propulsion (AREA)
  • Particle Accelerators (AREA)
  • Electron Sources, Ion Sources (AREA)
GB29286/70A 1969-06-26 1970-06-17 Method and device for the production of an ion beam having a large cross-sectional area Expired GB1292199A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR6921490A FR2045238A5 (fr) 1969-06-26 1969-06-26

Publications (1)

Publication Number Publication Date
GB1292199A true GB1292199A (en) 1972-10-11

Family

ID=9036427

Family Applications (1)

Application Number Title Priority Date Filing Date
GB29286/70A Expired GB1292199A (en) 1969-06-26 1970-06-17 Method and device for the production of an ion beam having a large cross-sectional area

Country Status (3)

Country Link
US (1) US3676693A (fr)
FR (1) FR2045238A5 (fr)
GB (1) GB1292199A (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2216714B (en) * 1988-03-11 1992-10-14 Ulvac Corp Ion implanter system

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3845312A (en) * 1972-07-13 1974-10-29 Texas Instruments Inc Particle accelerator producing a uniformly expanded particle beam of uniform cross-sectioned density
US4002912A (en) * 1975-12-30 1977-01-11 The United States Of America As Represented By The United States Energy Research And Development Administration Electrostatic lens to focus an ion beam to uniform density
DE2942045A1 (de) * 1979-10-17 1981-04-30 Siemens AG, 1000 Berlin und 8000 München Verfahren zur gleichmaessigen ausleuchtung von flaechen mittels eines strahles
US4283631A (en) * 1980-02-22 1981-08-11 Varian Associates, Inc. Bean scanning and method of use for ion implantation
DE3227426A1 (de) * 1982-07-22 1984-01-26 Siemens AG, 1000 Berlin und 8000 München Ablenkstruktur fuer ein korpuskularstrahl-austastsystem und verfahren zu seinem betrieb
US4661712A (en) * 1985-05-28 1987-04-28 Varian Associates, Inc. Apparatus for scanning a high current ion beam with a constant angle of incidence
US4804852A (en) * 1987-01-29 1989-02-14 Eaton Corporation Treating work pieces with electro-magnetically scanned ion beams
JP2648642B2 (ja) * 1990-04-17 1997-09-03 アプライド マテリアルズ インコーポレイテッド 巾広ビームでイオンインプランテーションを行なう方法及び装置
US5276330A (en) * 1991-05-29 1994-01-04 Etec Systems, Inc. High accuracy beam blanker

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3491236A (en) * 1967-09-28 1970-01-20 Gen Electric Electron beam fabrication of microelectronic circuit patterns
US3569757A (en) * 1968-10-04 1971-03-09 Houghes Aircraft Co Acceleration system for implanting ions in specimen

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2216714B (en) * 1988-03-11 1992-10-14 Ulvac Corp Ion implanter system

Also Published As

Publication number Publication date
FR2045238A5 (fr) 1971-02-26
US3676693A (en) 1972-07-11

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
435 Patent endorsed 'licences of right' on the date specified (sect. 35/1949)
PLNP Patent lapsed through nonpayment of renewal fees