GB1291038A - A process for etching chromium - Google Patents

A process for etching chromium

Info

Publication number
GB1291038A
GB1291038A GB2890571A GB2890571A GB1291038A GB 1291038 A GB1291038 A GB 1291038A GB 2890571 A GB2890571 A GB 2890571A GB 2890571 A GB2890571 A GB 2890571A GB 1291038 A GB1291038 A GB 1291038A
Authority
GB
United Kingdom
Prior art keywords
etching
ferric
sulphate
ions
chromium
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB2890571A
Inventor
Eugene Roman Skarvinko
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of GB1291038A publication Critical patent/GB1291038A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/10—Etching compositions
    • C23F1/14—Aqueous compositions
    • C23F1/16—Acidic compositions
    • C23F1/26—Acidic compositions for etching refractory metals
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
    • G03F1/80—Etching
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Abstract

1291038 Etching INTERNATIONAL BUISNESS MACHINES CORP 21 June 1971 [2 Sept 1970] 28905/70 Heading B6J A process for etching Cr comprises exposing the Cr to an etching solution containing Ce IV ions and ferric ions. The chromium may be vacuum deposited onto glass, covered with photoresist, selectively exposed, developed and etched using a solution of 1 to 4% by weight of cerric sulphate, 0.8 to 3% ferric sulphate and enough acid to give a pH value less than 2.0 and preferably less than 0.2. The acid may be nitric, hydrochloric, sulphuric, perchloric or acetic. Other ferric and ceric salts may be used such as ceric ammonium nitrate. The resultant chromium film mask on the glass may be used in the photofabrication of a semiconductor device.
GB2890571A 1970-09-02 1971-06-21 A process for etching chromium Expired GB1291038A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US6914270A 1970-09-02 1970-09-02

Publications (1)

Publication Number Publication Date
GB1291038A true GB1291038A (en) 1972-09-27

Family

ID=22087015

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2890571A Expired GB1291038A (en) 1970-09-02 1971-06-21 A process for etching chromium

Country Status (3)

Country Link
DE (1) DE2143522A1 (en)
FR (1) FR2101771A5 (en)
GB (1) GB1291038A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3920081A1 (en) * 1989-06-20 1991-01-03 Foerster Inst Dr Friedrich SEARCH COIL ARRANGEMENT

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0182306B1 (en) * 1984-11-17 1991-07-24 Daikin Industries, Limited Etchant composition

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3920081A1 (en) * 1989-06-20 1991-01-03 Foerster Inst Dr Friedrich SEARCH COIL ARRANGEMENT

Also Published As

Publication number Publication date
FR2101771A5 (en) 1972-03-31
DE2143522A1 (en) 1972-03-09

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Legal Events

Date Code Title Description
PS Patent sealed
PLNP Patent lapsed through nonpayment of renewal fees