GB1278827A - Focusing method and device - Google Patents

Focusing method and device

Info

Publication number
GB1278827A
GB1278827A GB40685/69A GB4068569A GB1278827A GB 1278827 A GB1278827 A GB 1278827A GB 40685/69 A GB40685/69 A GB 40685/69A GB 4068569 A GB4068569 A GB 4068569A GB 1278827 A GB1278827 A GB 1278827A
Authority
GB
United Kingdom
Prior art keywords
workpiece
focused
components
secondary radiation
focusing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB40685/69A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel Lucent SAS
Original Assignee
Alcatel SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alcatel SA filed Critical Alcatel SA
Publication of GB1278827A publication Critical patent/GB1278827A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/21—Means for adjusting the focus
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Welding Or Cutting Using Electron Beams (AREA)
  • Electron Sources, Ion Sources (AREA)
GB40685/69A 1968-08-14 1969-08-14 Focusing method and device Expired GB1278827A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR163168 1968-08-14

Publications (1)

Publication Number Publication Date
GB1278827A true GB1278827A (en) 1972-06-21

Family

ID=8653808

Family Applications (1)

Application Number Title Priority Date Filing Date
GB40685/69A Expired GB1278827A (en) 1968-08-14 1969-08-14 Focusing method and device

Country Status (3)

Country Link
US (1) US3691341A (enrdf_load_stackoverflow)
FR (1) FR1590147A (enrdf_load_stackoverflow)
GB (1) GB1278827A (enrdf_load_stackoverflow)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4127762A (en) * 1974-09-24 1978-11-28 Paton Boris E Method for controlling and stabilizing fusion depth in electron-beam welding and device for effecting same
JPS5830696B2 (ja) * 1976-06-28 1983-06-30 株式会社日立製作所 荷電粒子エネルギ−分析器
FR2559695B1 (fr) * 1984-02-20 1995-04-21 Mitsubishi Electric Corp Procede et appareil pour detecter et reguler la position d'un faisceau electronique de soudage
US5483036A (en) * 1993-10-28 1996-01-09 Sandia Corporation Method of automatic measurement and focus of an electron beam and apparatus therefor
US20050169346A1 (en) * 2004-01-29 2005-08-04 Trw Automotive U.S. Llc Method for monitoring quality of a transmissive laser weld
DE102011006899B4 (de) * 2011-04-06 2025-01-30 Te Connectivity Germany Gmbh Verfahren zur Herstellung von Kontaktelementen durch mechanisches Aufbringen von Materialschicht mit hoher Auflösung sowie Kontaktelement und eine Vorrichtung zur Herstellung
US9383460B2 (en) 2012-05-14 2016-07-05 Bwxt Nuclear Operations Group, Inc. Beam imaging sensor
US9535100B2 (en) 2012-05-14 2017-01-03 Bwxt Nuclear Operations Group, Inc. Beam imaging sensor and method for using same
CN115255595B (zh) * 2022-08-17 2023-08-22 中国航空制造技术研究院 一种双层板结构的电子束焊接聚焦电流确定方法

Also Published As

Publication number Publication date
DE1941255A1 (de) 1970-02-26
DE1941255B2 (de) 1973-06-20
US3691341A (en) 1972-09-12
FR1590147A (enrdf_load_stackoverflow) 1970-04-13

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Legal Events

Date Code Title Description
414F Notice of opposition given (sect. 14/1949)
414A Case decided by the comptroller ** specification amended (sect. 14/1949)
PS Patent sealed [section 19, patents act 1949]
SPA Amended specification published
PCNP Patent ceased through non-payment of renewal fee