GB1268572A - A method for alloying metals to substrates such as semiconductor wafers - Google Patents

A method for alloying metals to substrates such as semiconductor wafers

Info

Publication number
GB1268572A
GB1268572A GB34809/69A GB3480969A GB1268572A GB 1268572 A GB1268572 A GB 1268572A GB 34809/69 A GB34809/69 A GB 34809/69A GB 3480969 A GB3480969 A GB 3480969A GB 1268572 A GB1268572 A GB 1268572A
Authority
GB
United Kingdom
Prior art keywords
photoresist
substrate
layer
coating
july
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB34809/69A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of GB1268572A publication Critical patent/GB1268572A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00—Encapsulations, e.g. protective coatings
    • H10W74/40—Encapsulations, e.g. protective coatings characterised by their materials
    • H10W74/47—Encapsulations, e.g. protective coatings characterised by their materials comprising organic materials, e.g. plastics or resins
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • H10P95/50—Alloying conductive materials with semiconductor bodies
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/40—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Electrodes Of Semiconductors (AREA)
GB34809/69A 1968-07-15 1969-07-10 A method for alloying metals to substrates such as semiconductor wafers Expired GB1268572A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US74500968A 1968-07-15 1968-07-15
US14094171A 1971-05-06 1971-05-06

Publications (1)

Publication Number Publication Date
GB1268572A true GB1268572A (en) 1972-03-29

Family

ID=26838622

Family Applications (1)

Application Number Title Priority Date Filing Date
GB34809/69A Expired GB1268572A (en) 1968-07-15 1969-07-10 A method for alloying metals to substrates such as semiconductor wafers

Country Status (7)

Country Link
US (1) US3668025A (https=)
BE (1) BE736104A (https=)
CH (1) CH522044A (https=)
DE (1) DE1932164B2 (https=)
FR (1) FR2014594B1 (https=)
GB (1) GB1268572A (https=)
NL (1) NL6910772A (https=)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3604986A (en) * 1970-03-17 1971-09-14 Bell Telephone Labor Inc High frequency transistors with shallow emitters
NL7401858A (nl) * 1974-02-12 1975-08-14 Philips Nv Registratiedrager waarop informatie is aange- t in een optisch uitleesbare struktuur.
GB2016802B (en) * 1978-03-16 1982-09-08 Chevron Res Thin film photovoltaic cells
US4908689A (en) * 1986-05-06 1990-03-13 International Business Machines Corporation Organic solder barrier
WO2016130722A1 (en) * 2015-02-11 2016-08-18 Invensense, Inc. 3D INTEGRATION USING Al-Ge EUTECTIC BOND INTERCONNECT

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL268503A (https=) * 1960-12-09
NL132313C (https=) * 1964-12-17 1900-01-01

Also Published As

Publication number Publication date
FR2014594A1 (https=) 1970-04-17
US3668025A (en) 1972-06-06
CH522044A (de) 1972-04-30
BE736104A (https=) 1969-12-16
NL6910772A (https=) 1970-01-19
DE1932164A1 (de) 1970-03-05
DE1932164B2 (de) 1972-04-06
FR2014594B1 (https=) 1974-02-22

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