GB1263626A - Epitaxial method for fabricating an avalanche diode and product - Google Patents
Epitaxial method for fabricating an avalanche diode and productInfo
- Publication number
- GB1263626A GB1263626A GB24782/69A GB2478269A GB1263626A GB 1263626 A GB1263626 A GB 1263626A GB 24782/69 A GB24782/69 A GB 24782/69A GB 2478269 A GB2478269 A GB 2478269A GB 1263626 A GB1263626 A GB 1263626A
- Authority
- GB
- United Kingdom
- Prior art keywords
- substrate
- regions
- doped
- epitaxially deposited
- diode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 abstract 4
- 230000008021 deposition Effects 0.000 abstract 2
- 238000000151 deposition Methods 0.000 abstract 2
- 239000004065 semiconductor Substances 0.000 abstract 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 abstract 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 abstract 1
- 229910052787 antimony Inorganic materials 0.000 abstract 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 abstract 1
- 229910052796 boron Inorganic materials 0.000 abstract 1
- 229910052802 copper Inorganic materials 0.000 abstract 1
- 239000010949 copper Substances 0.000 abstract 1
- 238000009792 diffusion process Methods 0.000 abstract 1
- 238000005530 etching Methods 0.000 abstract 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 abstract 1
- 229910052737 gold Inorganic materials 0.000 abstract 1
- 239000010931 gold Substances 0.000 abstract 1
- 230000010355 oscillation Effects 0.000 abstract 1
- 229920002120 photoresistant polymer Polymers 0.000 abstract 1
- 229910052710 silicon Inorganic materials 0.000 abstract 1
- 239000010703 silicon Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D99/00—Subject matter not provided for in other groups of this subclass
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Electrodes Of Semiconductors (AREA)
- Light Receiving Elements (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US73779068A | 1968-06-17 | 1968-06-17 |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1263626A true GB1263626A (en) | 1972-02-16 |
Family
ID=24965343
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB24782/69A Expired GB1263626A (en) | 1968-06-17 | 1969-05-15 | Epitaxial method for fabricating an avalanche diode and product |
Country Status (4)
Country | Link |
---|---|
DE (1) | DE1930016C3 (enrdf_load_stackoverflow) |
FR (1) | FR2019285B1 (enrdf_load_stackoverflow) |
GB (1) | GB1263626A (enrdf_load_stackoverflow) |
NL (1) | NL6909204A (enrdf_load_stackoverflow) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2009134324A1 (en) * | 2008-04-29 | 2009-11-05 | Sandisk 3D Llc | Reduction of leakage current in a vertical diode |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL122283C (enrdf_load_stackoverflow) * | 1958-07-25 | |||
FR1519634A (fr) * | 1965-12-30 | 1968-04-05 | Siemens Ag | Diode à avalanche pour la production d'oscillations |
-
1969
- 1969-05-15 GB GB24782/69A patent/GB1263626A/en not_active Expired
- 1969-06-13 DE DE1930016A patent/DE1930016C3/de not_active Expired
- 1969-06-17 NL NL6909204A patent/NL6909204A/xx unknown
- 1969-06-17 FR FR696920070A patent/FR2019285B1/fr not_active Expired
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2009134324A1 (en) * | 2008-04-29 | 2009-11-05 | Sandisk 3D Llc | Reduction of leakage current in a vertical diode |
US8450835B2 (en) | 2008-04-29 | 2013-05-28 | Sandisk 3D Llc | Reverse leakage reduction and vertical height shrinking of diode with halo doping |
Also Published As
Publication number | Publication date |
---|---|
NL6909204A (enrdf_load_stackoverflow) | 1969-12-19 |
DE1930016A1 (de) | 1969-12-18 |
FR2019285A1 (enrdf_load_stackoverflow) | 1970-07-03 |
DE1930016B2 (de) | 1973-10-04 |
FR2019285B1 (enrdf_load_stackoverflow) | 1974-02-22 |
DE1930016C3 (de) | 1974-05-09 |
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