GB1257342A - - Google Patents

Info

Publication number
GB1257342A
GB1257342A GB1257342DA GB1257342A GB 1257342 A GB1257342 A GB 1257342A GB 1257342D A GB1257342D A GB 1257342DA GB 1257342 A GB1257342 A GB 1257342A
Authority
GB
United Kingdom
Prior art keywords
mask
jan
sputtering apparatus
rotatable
substrate carriers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of GB1257342A publication Critical patent/GB1257342A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

1,257,342. Sputtering apparatus. LIGNES TELEGRAPHIQUES ET TELEPHONIQUES. Jan.7,1969 [Jan. 11, 1968; July 30, 1968], No. 968/69. Heading C7F. A sputtering apparatus comprises adjustable cylindrical targets 18, 23 mounted on a stationary column 8, cathode 27, anode 42, rotatable substrate carriers 20, 44 (only two of six shown), and a cylindrical mask 58 which may be rotated and moved vertically. The plasma is focused by an external magnetic coil 45. The mask comprises two apertured cylinders 83, 84, stationary and rotatable, respectively. Rotation of the mask may be manual through a drive 91 or by an electromagnetic drive. The substrate carriers rotate about their own vertical axis. The substrates may be preheated by electric resistance or infrared heaters and may be cleaned by ionic bombardment. The vacuum vessel 15 may be double walled for water cooling.
GB1257342D 1968-01-11 1969-01-07 Expired GB1257342A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR135568 1968-01-11
FR06009034 1968-02-21
FR161082A FR94900E (en) 1968-01-11 1968-07-30 Large capacity sputtering apparatus.

Publications (1)

Publication Number Publication Date
GB1257342A true GB1257342A (en) 1971-12-15

Family

ID=27244767

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1257342D Expired GB1257342A (en) 1968-01-11 1969-01-07

Country Status (4)

Country Link
BE (1) BE726267A (en)
DE (1) DE1901211A1 (en)
FR (1) FR94900E (en)
GB (1) GB1257342A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114720048A (en) * 2022-06-09 2022-07-08 季华实验室 Capacitor film vacuum gauge and NEG film preparation method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114720048A (en) * 2022-06-09 2022-07-08 季华实验室 Capacitor film vacuum gauge and NEG film preparation method
CN114720048B (en) * 2022-06-09 2022-09-02 季华实验室 Capacitor film vacuum gauge and NEG film preparation method

Also Published As

Publication number Publication date
DE1901211A1 (en) 1970-09-24
FR94900E (en) 1970-01-16
BE726267A (en) 1969-05-29

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Legal Events

Date Code Title Description
PS Patent sealed
PLNP Patent lapsed through nonpayment of renewal fees