GB1245153A - Improvements in or relating to mass spectrometer leak detectors - Google Patents

Improvements in or relating to mass spectrometer leak detectors

Info

Publication number
GB1245153A
GB1245153A GB55987/68A GB5598768A GB1245153A GB 1245153 A GB1245153 A GB 1245153A GB 55987/68 A GB55987/68 A GB 55987/68A GB 5598768 A GB5598768 A GB 5598768A GB 1245153 A GB1245153 A GB 1245153A
Authority
GB
United Kingdom
Prior art keywords
getter
cathodes
mass spectrometer
noble gases
getter material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB55987/68A
Other languages
English (en)
Inventor
Lewis Dana Hall
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of GB1245153A publication Critical patent/GB1245153A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J7/00—Details not provided for in the preceding groups and common to two or more basic types of discharge tubes or lamps
    • H01J7/14—Means for obtaining or maintaining the desired pressure within the vessel
    • H01J7/18—Means for absorbing or adsorbing gas, e.g. by gettering
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
    • H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Examining Or Testing Airtightness (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
GB55987/68A 1967-11-29 1968-11-26 Improvements in or relating to mass spectrometer leak detectors Expired GB1245153A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US68660967A 1967-11-29 1967-11-29

Publications (1)

Publication Number Publication Date
GB1245153A true GB1245153A (en) 1971-09-08

Family

ID=24757020

Family Applications (1)

Application Number Title Priority Date Filing Date
GB55987/68A Expired GB1245153A (en) 1967-11-29 1968-11-26 Improvements in or relating to mass spectrometer leak detectors

Country Status (5)

Country Link
US (1) US3591827A (enExample)
DE (1) DE1808385A1 (enExample)
FR (1) FR1595764A (enExample)
GB (1) GB1245153A (enExample)
NL (1) NL6815469A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2123153A (en) * 1982-06-30 1984-01-25 Boc Group Plc Leak detector
GB2190204A (en) * 1986-05-09 1987-11-11 Boc Group Plc Search gas leak detector

Families Citing this family (54)

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US3866041A (en) * 1973-10-23 1975-02-11 Allis Chalmers Method and apparatus for evaluating the gas content of materials
JPS56126733A (en) * 1980-03-10 1981-10-05 Nippon Sanso Kk Detecting method for leakage of helium
FR2666410B1 (fr) * 1990-09-05 1993-10-08 Alcatel Cit Detecteur de fuite haut flux a trois filtres moleculaires.
DE4326265A1 (de) * 1993-08-05 1995-02-09 Leybold Ag Testgasdetektor, vorzugsweise für Lecksuchgeräte, sowie Verfahren zum Betrieb eines Testgasdetektors dieser Art
US5655886A (en) * 1995-06-06 1997-08-12 Color Planar Displays, Inc. Vacuum maintenance device for high vacuum chambers
FR2761776B1 (fr) * 1997-04-03 1999-07-23 Alsthom Cge Alcatel Detecteur de fuite a gaz traceur
TW460943B (en) * 1997-06-11 2001-10-21 Applied Materials Inc Reduction of mobile ion and metal contamination in HDP-CVD chambers using chamber seasoning film depositions
US6082414A (en) * 1998-12-03 2000-07-04 Taiwan Semiconductor Manufacturing Company, Ltd Apparatus and method for replacing an attachment on a vacuum chamber
US6498344B1 (en) * 1999-10-01 2002-12-24 Siemens Energy & Automation, Inc. Triode ion pump
CN1720432B (zh) * 2003-06-11 2010-09-29 瓦里安有限公司 用于密封物品中大泄漏检测的方法和装置
CN100529705C (zh) * 2003-06-11 2009-08-19 瓦里安有限公司 用于大泄漏测试的方法和装置
JP4511543B2 (ja) * 2003-06-11 2010-07-28 バリアン・インコーポレイテッド 蓄積法による漏れ検出装置および方法
EP1860419B1 (en) * 2003-06-11 2014-02-26 Agilent Technologies, Inc. Apparatus for leak detection
WO2005059499A1 (en) * 2003-12-19 2005-06-30 Tpa Brianza Picc.Soc.Coop.A.R.L. System and device for leak detection
US7295015B2 (en) * 2004-02-19 2007-11-13 Brooks Automation, Inc. Ionization gauge
US7030619B2 (en) * 2004-02-19 2006-04-18 Brooks Automation, Inc. Ionization gauge
DE102004034381A1 (de) * 2004-07-16 2006-02-16 Inficon Gmbh Gassensor und Verfahren zum Betreiben einer Getterpumpe
KR100773391B1 (ko) * 2005-09-01 2007-11-05 한국전기연구원 박판 접합 장치 및 이를 이용한 박판 접합 방법
US7427751B2 (en) 2006-02-15 2008-09-23 Varian, Inc. High sensitivity slitless ion source mass spectrometer for trace gas leak detection
US7459677B2 (en) * 2006-02-15 2008-12-02 Varian, Inc. Mass spectrometer for trace gas leak detection with suppression of undesired ions
US7429863B2 (en) * 2006-07-18 2008-09-30 Brooks Automation, Inc. Method and apparatus for maintaining emission capabilities of hot cathodes in harsh environments
US20080202210A1 (en) * 2007-02-28 2008-08-28 Varian, Inc. Test gas leak detection using a composite membrane
US7497110B2 (en) * 2007-02-28 2009-03-03 Varian, Inc. Methods and apparatus for test gas leak detection
DE102008011686A1 (de) * 2008-02-28 2009-09-03 Inficon Gmbh Heliumsensor
US9359554B2 (en) 2012-08-17 2016-06-07 Suncoke Technology And Development Llc Automatic draft control system for coke plants
US9243186B2 (en) 2012-08-17 2016-01-26 Suncoke Technology And Development Llc. Coke plant including exhaust gas sharing
WO2014105065A1 (en) 2012-12-28 2014-07-03 Suncoke Technology And Development Llc. Vent stack lids and associated systems and methods
WO2014105063A1 (en) 2012-12-28 2014-07-03 Suncoke Technology And Development Llc. Systems and methods for maintaining a hot car in a coke plant
EP2938426A4 (en) 2012-12-28 2016-08-10 Suncoke Technology & Dev Llc SYSTEMS AND METHOD FOR REMOVING MERCURY FROM EMISSIONS
US10883051B2 (en) 2012-12-28 2021-01-05 Suncoke Technology And Development Llc Methods and systems for improved coke quenching
US9476547B2 (en) 2012-12-28 2016-10-25 Suncoke Technology And Development Llc Exhaust flow modifier, duct intersection incorporating the same, and methods therefor
US9273250B2 (en) 2013-03-15 2016-03-01 Suncoke Technology And Development Llc. Methods and systems for improved quench tower design
US8829425B1 (en) 2013-05-24 2014-09-09 Bayspec, Inc. Apparatus and methods for creating a vacuum in a portable mass spectrometer
WO2015103414A1 (en) 2013-12-31 2015-07-09 Suncoke Technology And Development Llc Methods for decarbonizing coking ovens, and associated systems and devices
BR112017004981B1 (pt) 2014-09-15 2021-05-11 Suncoke Technology And Development Llc câmara de forno de coque
WO2016109704A1 (en) 2014-12-31 2016-07-07 Suncoke Technology And Development Llc Multi-modal beds of coking material
KR102531894B1 (ko) 2015-01-02 2023-05-11 선코크 테크놀러지 앤드 디벨로프먼트 엘엘씨 고급 제어 및 최적화 기술을 이용한 통합형 코크스 플랜트 자동화 및 최적화
PL3397719T3 (pl) 2015-12-28 2021-02-22 Suncoke Technology And Development Llc Sposób i system do dynamicznego załadunku pieca koksowniczego
RU2746968C2 (ru) 2016-06-03 2021-04-22 САНКОУК ТЕКНОЛОДЖИ ЭНД ДИВЕЛОПМЕНТ ЭлЭлСи. Способы и системы для автоматического создания корректирующих действий в промышленном объекте
CN110832055B (zh) 2017-05-23 2023-02-03 太阳焦炭科技和发展有限责任公司 用于修补炼焦炉的系统和方法
BR112021012511B1 (pt) 2018-12-28 2023-05-02 Suncoke Technology And Development Llc Sistema de forno de recuperação de calor carregado por mola e método
WO2020140087A1 (en) 2018-12-28 2020-07-02 Suncoke Technology And Development Llc Coke plant tunnel repair and anchor distribution
BR112021012500B1 (pt) 2018-12-28 2024-01-30 Suncoke Technology And Development Llc Duto coletor ascendente, sistema de gás de escape para um forno de coque, e forno de coque
BR112021012455B1 (pt) 2018-12-28 2023-10-24 Suncoke Technology And Development Llc Forno de coque
US11021655B2 (en) 2018-12-28 2021-06-01 Suncoke Technology And Development Llc Decarbonization of coke ovens and associated systems and methods
CA3125585C (en) 2018-12-31 2023-10-03 Suncoke Technology And Development Llc Improved systems and methods for utilizing flue gas
BR112021012952A2 (pt) 2018-12-31 2021-09-08 Suncoke Technology And Development Llc Métodos e sistemas para fornecer superfícies resistentes a corrosão em sistemas de tratamento de contaminantes
US12227699B2 (en) 2019-12-26 2025-02-18 Suncoke Technology And Development Llc Oven health optimization systems and methods
EP4146767A4 (en) 2020-05-03 2024-07-31 Suncoke Technology and Development LLC High-quality coke products
KR102858934B1 (ko) 2021-11-04 2025-09-11 선코크 테크놀러지 앤드 디벨로프먼트 엘엘씨 주물용 코크스 제품 및 관련 시스템, 장치 및 방법
US11946108B2 (en) 2021-11-04 2024-04-02 Suncoke Technology And Development Llc Foundry coke products and associated processing methods via cupolas
DE102022111596A1 (de) * 2022-05-10 2023-11-16 Inficon Gmbh Lecksuchvorrichtung und Lecksuchverfahren zur Detektion eines Gaslecks in einem Prüfling
EP4612257A1 (en) 2022-11-04 2025-09-10 Suncoke Technology and Development LLC Coal blends, foundry coke products, and associated systems, devices, and methods
US12410369B2 (en) 2023-11-21 2025-09-09 Suncoke Technology And Development Llc Flat push hot car for foundry coke and associated systems and methods

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2486199A (en) * 1945-09-10 1949-10-25 Univ Minnesota Method and apparatus for determining leaks
DE1302826B (enExample) * 1962-07-16 Ges Fuer Kernforschung Mbh
US3391303A (en) * 1965-01-25 1968-07-02 Lewis D. Hall Electronic vacuum pump including a sputter electrode

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2123153A (en) * 1982-06-30 1984-01-25 Boc Group Plc Leak detector
GB2190204A (en) * 1986-05-09 1987-11-11 Boc Group Plc Search gas leak detector
GB2190204B (en) * 1986-05-09 1990-10-17 Boc Group Plc Improvement in leak detectors

Also Published As

Publication number Publication date
NL6815469A (enExample) 1969-06-02
DE1808385A1 (de) 1969-07-17
US3591827A (en) 1971-07-06
FR1595764A (enExample) 1970-06-15

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